Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane

Sensors and Actuators, A: Physical

Volumn 119, Issue 1, 2005, Pages 196-205

  Tiggelaar, Roald M ^a   Van Male, Poul ^b   Berenschot, J W ^a   Gardeniers, J G E ^a   Oosterbroek, R Edwin ^a   De Croon, Mart H J M ^b   Schouten, Jaap C ^b   Van Den Berg, Albert ^a   Elwenspoek, Miko C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Membrane; Micromachining; Microreactor; Shadow mask; Solid source doping; Thin film deposition

Indexed keywords

CHANNEL FLOW; DEPOSITION; DOPING (ADDITIVES); ETCHING; FABRICATION; HEATING EQUIPMENT; HYDROGEN; MEMBRANES; MICROMACHINING; OXIDATION; SENSORS; SILICON; SINGLE CRYSTALS; THIN FILMS;

MICROREACTORS; SHADOW MASK; SOLID-SOURCE DOPING; THIN-FILM DEPOSITION;

HIGH TEMPERATURE REACTORS;

EID: 17144379361     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.09.004     Document Type: Article

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