Model for the etching of Ti and TiN in SC-1 solutions

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 447-458

  Verhaverbeke, Steven ^a   Parker, Jennifer W ^a  

^a CFM Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; HYDROGEN PEROXIDE; MATHEMATICAL MODELS; SOLUTIONS; SURFACE CLEANING; TITANIUM; TITANIUM NITRIDE;

AMMONIUM HYDROXIDE;

ETCHING;

EID: 0030655415     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)