On-chip deposition of carbon nanotubes using CMOS microhotplates

Nanotechnology

Volumn 19, Issue 2, 2008, Pages

  Haque, M S ^a   Teo, K B K ^a   Rupensinghe, N L ^a   Ali, S Z ^a   Haneef, I ^a   Maeng, Sunglyul ^b   Park, J ^b   Udrea, F ^a   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; DEPOSITION; MICROFABRICATION; TUNGSTEN;

BULK HEATING; GROWTH TEMPERATURES; MICROHOTPLATES;

CARBON NANOTUBES;

CARBON; METAL OXIDE; NANOTUBE; SILICON; TUNGSTEN;

ARTICLE; DEGRADATION; ELECTRODE; HEATING; PRIORITY JOURNAL; QUANTITATIVE ANALYSIS; RAMAN SPECTROMETRY; TEMPERATURE;

EID: 36849002295     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/02/025607     Document Type: Article

References (37)

1. McAleer J F, Moseley P T, Norris J O W and Williams D E 1987 J. Chem. Soc. Faraday Trans. 83 1323-46
2. Chung W Y, Lim J W, Lee D D, Miura N and Yamazoe N 2000 Sensors Actuators B 64 118-23
3. Popov V N 2004 Mater. Sci. Eng. R 43 61-102
4. Baughman R H, Zakhidov A A and de Heer W A 2002 Science 297 787-92
5. Terrones M 2003 Annu. Rev. Mater. Res. 33 419-501
6. Ajayan P M and Zhou O 2001 Topics in Applied Physics (New York: Springer)
7. de Heer W A 2004 MRS Bull. 29 281-5
8. Bekyarova E, Ni Y, Malarkey E, Montana V, McWilliams J, Haddon R and Parpura V 2005 Nanotechnology 1 3-17
9. Sinha N and Yeow J T-W 2005 IEEE Trans. Nanobiosci. 4 180-95
10. Oberlin A, Endo M and Koyama T 1976 J. Cryst. Growth 32 335-49
11. Ijima S 1991 Nature 354 56-8
12. Ijima S, Ajayan P M and Ichihashi T 1992 Phys. Rev. Lett. 69 3100-3
13. Sinha N, Ma J and Yeow J 2006 J. Nanosci. Nanotechnol. 6 573-90
14. Endo M, Hayashi T, Kim Y and Muramatsu H 2006 Japan. J. Appl. Phys. 45 4883-92
15. Valentini L, Armentano I, Kenny J M, Cantalini C, Lozzi L and Santucci S 2003 Appl. Phys. Lett. 82 961-3
16. Modi A, Koratkar N, Lass E, Wei B and Ajayyan P M 2003 Nature 424 171-4
17. Peng S and Cho K 2000 Nanotechnology 11 57-60
18. Kong J, Franklin N, Zhou C, Chapline M, Peng S, Cho K and Dai H 2000 Science 287 622-5
19. Chhowalla M, Teo K B K, Ducati C, Rupensinghe N L, Amaratunga G A J, Ferrari A C, Roy D, Robertson J and Milne W I 2001 J. Appl. Phys. 90 5308-17
20. Jose-Yacaman M, Miki-Yoshida M, Rendon L and Santiesteban J G 1993 Appl. Phys. Lett. 62 202-4
21. Varadan V and Xie J 2002 Smart Mater. Struct. 11 610-6
22. Park D, Hoon Kim Y and Kee Lee J 2003 Carbon 41 1025-9
23. Udrea F, Gardner J, Setiadi D, Covington J, Dogaru T, Lua C and Milne W 2001 Sensors Actuators B 78 190
24. Guha P K, Ali S Z, Lee C C C, Udrea F, Milne W I, Iwaki T, Covington J A and Gardner J W 2007 Sensors Actuators B 127 1, 20, 260-6
25. Ali S, Guha P, Lee C, Udrea F, Milne W, Iwaki T, Covington J, Gardner J, Maeng S and Park J 2007 Sensors, 2006: 5th IEEE Conf. pp 847-50
26. Laconte J, Dupont C, Flandre D and Raskin J 2004 IEEE Sens. J. 4 670-80
27. Simon I, Barsan N, Bauer M and Weimar U 2001 Sensors Actuators B 73 1-26
28. Udrea F, Garner D, Sheng K, Popescu A, Lim H and Milne V 2000 Electron. Commun. Eng. J. 12 27-40
29. Briand D, Vincent M, Suter M, Schurmann G, de Rooij N, Doan D and Dang M 2007 Sensors, 2006: 5th IEEE Conf. pp 671-4
30. Englander O, Christensen D and Lin L 2003 Appl. Phys. Lett. 82 4797-9
31. Jungen A, Stampfer C, Tonteling M, Schiesser S, Sarangi D and Hierold C 2005 Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS'05: The 13th Int. Conf. on Solid State Sensors Actuators and Microsystems pp 93-6
32. Haque M, Oei S, Teo K, Udrea F, Gardner J and Milne W 2006 Nanotech 2006: 9th Annual NSTI Nanotechnology Conf.
33. Kayastha V K, Yap Y K, Pan Z, Ivanov I N, Puretzky A A and Geohegan D B 2005 Appl. Phys. Lett. 86 253105-3
34. Shan B and Cho K 2004 Phys. Rev. B 70 233405
35. Iwaki T, Covington J, Gardner J, Udrea F, Blackman C and Parkin I 2007 Sensors, 2006: 5th IEEE Conf. pp 460-3
36. Briand D, Krauss A, Schoot B, Weimer U, Barsan N, Gopel W and Rooij N F 2000 Sensors Actuators B 68 223-33
37. Udrea F et al 2007 IEDM: Proc. IEEE Int. Electron Devices Mtg Technical Digest (Washington, DC, Dec.) (Abstract) ID No. 332