Mechanical characterization of reactively magnetron-sputtered TiN films

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 375-382

  Vaz, F ^a   Machado, P ^a   Rebouta, L ^a   Cerqueira, P ^a   Goudeau, Ph ^b   Riviere J P ^b   Alves, E ^c   Pischow, K ^d   de Rijk, J ^d  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITÉ DE POITIERS   (France)

^c INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^d Savcor Group Ltd Oy   (Finland)

Author keywords

Ion bombardment; R.f. power; Stress state; TiN phase

Indexed keywords

ADHESION; ARGON; COMPRESSIVE STRESS; CRACKS; ELECTRIC POTENTIAL; GRAIN SIZE AND SHAPE; HARDNESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; NITROGEN; RESIDUAL STRESSES; STRESS RELAXATION; TEXTURES; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

INTERNAL CRACKS;

COATINGS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18244425771     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00711-4     Document Type: Article

References (38)

1. Lévy F. Hones P. Schmid P.E. Sanjinés R. Diserens M. Wiener C. Surf. Coat. Technol. 120-121 1999 284
2. Shiao M.H. Kao S.A. Shieu F.S. Thin Solid Films 375 2000 163
3. Wittmer M. J. Vac. Sci. Technol. A 3 1985 1797
4. Dimitriadis C.A. Logothetidis S. Alexandrou I. Appl. Phys. Lett. 66 1995 502
5. Rivory J. Behaghel J.M. Berthier S. Lafait J. Thin Solid Films 78 1981 161
6. Mumtaz A. Class W.H. J. Vac. Sci. Technol. 20 3 1982 345
7. Münz W.D. Hofmann D. Metalloberfläche 37 1983 7
8. Perry A.J. Schoenes J. Vacuum 36 1986 149
9. Perry A.J. Thin Solid Films 135 1986 73
10. Perry A.J. Georgson M. Sproul W.D. Thin Solid Films 157 1988 255
11. Beck U. Reiners G. Urban I. Witt K. Thin Solid Films 220 1992 234
12. Reiners G. Hantsche H. Jehn H.A. Kopacz U. Rack A. Surf. Coat. Technol. 54-55 1992 273
13. Beck U. Riners G. Witt K. Thin Solid Films 236 1993 184
14. Reiners G. Beck U. Jehn H.A. Thin Solid Films 253 1994 33
15. Randhawa H. Surf. Coat. Technol. 36 1988 829
16. Kopacz U. Riedl R. Z. Metallkd. 7 1992 492
17. Mignot J. Rondot Acta Metallurgica 23 1975 1321
18. Stoney G.G. Proc. Roy. Soc. (Lond.) [A] 82 1909 172
19. for detailed information on the procedure see: Vaz F. Rebouta L. Goudeau P. et al. Thin Solid Films 402 2002 195
20. Doerner M.F. Nix W.D. J. Mater. Res. 1 1992 397
21. Pharr G.M. Oliver W.C. MRS Bull. 17 7 1992 28
22. Sneddon I.N. Int. J. Eng. Sci. 3 1965 47
23. Vaz F. Rebouta L. Ramos S. da Silva M.F. Soares J.C. Surf. Coat. Technol. 108-109 1998 236
24. Vaz F. Machado P. Rebouta L. et al. Thin Solid Films 420-421 2002
25. Thornton J.A. Am. Rev. Mater. Sci. 7 1977 239
26. Powder Diffraction File of the International Center for Diffraction Data, PDF-ICDD No. 38-1420
27. Groudeva-Zotova S. Kaltofen R. Sebald T. Surf. Coat. Technol. 127 2000 144
28. Imai Y. Mukaida M. Watanabe A. Tsunoda T. Thin Solid Films 300 1997 305
29. Ribeiro E. Malczyk A. Carvalho S. et al. Surf. Coat. Technol. 151-152 2002 515
30. Windischmann H. Crit. Rev. Solid State Mater. Sci. 17 1992 547
31. D'Heurle F.M. Metall. Trans. 1 1970 725
32. Jouan P.Y. Lempérère G. Thin Solid Films 237 1994 200
33. Cueff R. Baud G. Benmalek M. et al. Thin Solid Films 270 1995 230
34. Davis C.A. Thin Solid Films 226 1993 30
35. Karlsson K. Hultman L. Sundgren J.-E. Thin Solid Films 371 2000 167
36. Ljungcrantz H. Hultman L. Sundgren J.-E. Hakansson G. Karlsson L. J. Appl. Phys. 78 1995 832
37. Oettel H. Bertram T. Weihnacht V. Wiedemann R. Zitzewitz S.V. Surf. Coat. Technol. 97 1997 785
38. Veprek S. Nesládek P. Niederhofer A. Glatz F. J́lek M. Śma M. Surf. Coat. Technol. 108-109 1998 138