Exploring silicon carbide for thermal infrared radiators

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 620-623

  Chen, Li ^a   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; EMISSION SPECTROSCOPY; MECHANICAL PROPERTIES; MODULATION; RADIATORS; SENSORS;

DEVICE RELIABILITIES; ELECTRICAL AND MECHANICAL PROPERTIES; FAST THERMAL CYCLING; HIGH FREQUENCIES; MATERIALS ANALYSES; MECHANICAL ROBUSTNESSES; MODULATION DEPTHS; PEAK EMISSION WAVELENGTHS; PULSED OPERATIONS; SHORT WAVELENGTHS; THERMAL INFRARED;

SILICON CARBIDE;

EID: 48349145382     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388475     Document Type: Conference Paper

References (10)

1. V. Norkus, et al., "Hot filament infrared radiators and pyroeleetric single-element detectors for analytical application", DIAS Infrared GmbH. Technical Publications, No. 12, 2001.
2. Dorfman, et al., "Diamond-like metallic nanocomposites", United States Patent, #5,466,431, 1995.
3. M. Parameswaran, et al., "Micromachined Thermal Radiation Emitter from a Commercial CMOS Process", IEEE Electron Device Letters, Vol. 12, No. 2, pp. 57-59, 1991.
4. D. Bauer, et al., "Design and Fabrication of a Thermal Infrared Emitter", Sensors and Actuators A, Vol. 55, pp. 57-63, 1996.
5. H. Yuasa, et al., "Single Crystal Silicon Micromachined Pulsed Infrared Light Source", Tech. Digest, Transducers'97 (Chicago, IL, June 16-19), pp. 1271-1274, 1997.
6. J. Tu, et al., "Micromachined, Silicon Filament Light Source for Spectrophotometric Microsystems", Applied Optics, Vol. 42, No. 13, pp. 2388-2397, 2003.
7. J. Spannhake, et al., "Design, Development and Operational Concept of an Advanced MEMS IR Source for Miniaturized Gas Sensor Systems", Proc. of IEEE Sensors Conference (Irvine, CA, Oct. 30-Nov.3), pp.162-165, 2005.
8. O. Schulz, et al., "Impact of Environmental Parameters on the Emission Intensity of Micromachined Infrared Sources", Sensors and Actuators A, Vol. 121, pp.172-180, 2005.
9. H. Sai, et al., "Tuning of the Thermal Radiation Spectrum in the Near-Infrared Region by Metallic Surface Microstructures", J. Micromech. Microeng., Vol. 15, pp. S243-S249, 2005.
10. A. J. Knobloch, et al., "Experimental Study of a Novel Silicon Carbide MEMS Ignition Device", Proc. of Transducers'2007 (Lyon, France, June 10-14), pp. 2167-2170, 2007.