Fabrication and reliability testing of Ti/TiN heaters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 284-293

  De Moor, P ^a   Witvrouw, A ^a   Simons, V ^a   De Wolf, I ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CURRENT DENSITY; ELECTRIC RESISTANCE; EMISSION SPECTROSCOPY; HEATING EQUIPMENT; RELIABILITY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING; TEMPERATURE; THERMOANALYSIS; TITANIUM COMPOUNDS;

INTERCONNECT RESISTANCE; LOW TEMPERATURE COEFFICIENT OF RESISTANCE; RESISTIVE HEATERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033326121     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)