Reliability improvement of suspended platinum-based micro-heating elements

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 284-291

  Courbat, J ^a   Briand, D ^a   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Aging; Heater; Iridium; Material; Micro hotplate; Platinum; Reliability

Indexed keywords

AGING OF MATERIALS; DEFORMATION; IRIDIUM; PLATINUM; RELIABILITY ANALYSIS; SCANNING ELECTRON MICROSCOPY; SERVICE LIFE; SILICON NITRIDE;

LIFE EXPECTANCY; MICRO HOTPLATE; RELIABILITY IMPROVEMENT;

ELECTRIC HEATING ELEMENTS;

EID: 38849098322     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.006     Document Type: Article

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