MEMS hotplates with TiN as a heater material

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 330-333

  Creemer, J F ^a   Van Der Vlist, W ^b   De Boer, C R ^b   Zandbergen, H W ^a   Sarro, P M ^b   Briand, D ^c   De Rooij, N F ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRON SCATTERING; MICROELECTROMECHANICAL DEVICES; SPUTTERING; STRESS ANALYSIS; TEMPERATURE MEASUREMENT;

CONDUCTION ELECTRONS; HOTPLATES; MICROREACTORS; TEMPERATURE SENSING; THORNTON MODEL;

TITANIUM NITRIDE;

EID: 33847273683     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597703     Document Type: Conference Paper

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