Micromachined IR-source with excellent blackbody like behaviour

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 540-548

  Konz, W ^a   Hildenbrand, J ^a   Bauersfeld, M ^a   Hartwig, S ^a   Lambrecht, A ^a   Lehmann, V ^b   Wollenstein J ^a  

^a FRAUNHOFER INSTITUTE FOR PHYSICAL MEASUREMENT TECHNIQUES IPM   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Black body radiation; Ir emitter; Macro porous silicon; Planar thermal source; Thermal emitter

Indexed keywords

CRYSTAL STRUCTURE; PARTICULATE EMISSIONS; RADIATORS; SILICON;

BLACK BODY RADIATION; IR-EMITTERS; MACRO-POROUS SILICON; PLANAR THERMAL SOURCE; THERMAL EMITTER;

MICROMACHINING;

EID: 28344442943     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.608712     Document Type: Conference Paper

References (5)

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