A substrate energy dissipation mechanism in in-phase and anti-phase micromachined z-axis vibratory gyroscopes

Journal of Micromechanics and Microengineering

Volumn 18, Issue 9, 2008, Pages

  Trusov, Alexander A ^a   Schofield, Adam R ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749149332     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/9/095016     Document Type: Article

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