Highly decoupled single-crystal silicon resonators: An approach for the intrinsic quality factor

Journal of Micromechanics and Microengineering

Volumn 16, Issue 6, 2006, Pages

  Le Foulgoc, Baptiste ^a   Bourouina, Tarik ^b   Le Traon, Olivier ^a   Bosseboeuf, Alain ^c   Marty, Frédéric ^b   Breluzeau, Cédric ^c   Grandchamp, Jean Paul ^c   Masson, Stève ^a  

^a ONERA   (France)

^b Ecole Superieure d'Ingenieurs en   (France)

^c UNIV PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ENERGY DISSIPATION; MATHEMATICAL MODELS; OPTICAL MICROSCOPY; SILICON WAFERS; SINGLE CRYSTALS;

QUALITY FACTOR; SILICON RESONATORS; THERMOELASTIC THEORY;

RESONATORS;

EID: 33845586345     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/6/S08     Document Type: Article

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