SCOPUS 정보 검색 플랫폼

Volumn 91, Issue 1, 2007, Pages

Using the temperature dependence of resonator quality factor as a thermometer

b NONE

Author keywords

[No Author keywords available]

Indexed keywords

IDEAL SENSOR; OSCILLATOR SYSTEM; RESONATOR QUALITY FACTOR; TEMPERATURE RESOLUTION;

FEEDBACK CONTROL; MICROMECHANICS; RESONATORS; SILICON;

THERMOMETERS;

EID: 36049006848 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2753758 Document Type: Article

Times cited : (56)

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