Squeeze-film damping in the free molecular regime: Model validation and measurement on a MEMS

Journal of Micromechanics and Microengineering

Volumn 17, Issue 11, 2007, Pages 2231-2240

  Sumali, Hartono ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; LASER DOPPLER VELOCIMETERS; MICROSCOPES; OSCILLATORS (ELECTRONIC); REYNOLDS EQUATION; SUBSTRATES;

DAMPING RATIOS; FREE MOLECULAR REGIME; SQUEEZE-FILM DAMPING (SFD);

MEMS;

EID: 35648975607     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/11/009     Document Type: Article

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