Capacitive detection in resonant MEMS with arbitrary amplitude of motion

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1583-1592

  Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CAPACITANCE; CAPACITORS; EQUATIONS OF MOTION; MOTION CONTROL;

ARBITRARY AMPLITUDE; CAPACITIVE DETECTION; CONSTRUCTIVE EQUATIONS; ELECTRICAL SENSING SIGNALS; PARALLEL PLATE CAPACITORS;

MEMS;

EID: 34547666916     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/022     Document Type: Article

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