Multi-degree of freedom tuning fork gyroscope demonstrating shock rejection

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 120-123

  Schofield, Adam R ^a   Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; TUNING; ULTRASONIC DEVICES;

AMBIENT VIBRATIONS; ANTI PHASE; COMMON MODE REJECTIONS; COMMON MODES; CORIOLIS; DEGREE OF FREEDOMS; DIFFERENTIAL SIGNALS; DRIVE MODES; ENVIRONMENTAL VARIATIONS; FABRICATION IMPERFECTIONS; FLAT GAINS; MECHANICAL SYSTEMS; MEMS TUNING; SENSE MODES; SINGLE OUTPUTS; STRUCTURAL ROBUSTNESSES; TUNING FORK GYROSCOPES; TUNING FORKS;

SENSORS;

EID: 48349146605     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388350     Document Type: Conference Paper

References (5)

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2. C. Acar and A. Shkel, "Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator," J. Microelectromech. Syst., vol. 15, no. 2, pp. 380-387, April 2006.
3. M. Weinberg and A. Kourepenis, "Error sources in in-plane silicon tuningfork mems gyroscopes," J. Microelectromech. Syst., vol. 15, no. 3, pp. 479-491, June 2006.
4. R. Neul, U. Gomez, K. Kehr, W. Bauer, J. Classen, C. Doring, E. Esch, S. Gotz, J. Hauer, B. Kuhlmann, C. Lang, M. Veith, and R. Willig, "Micromachined gyros for automotive applications," in Proc. IEEE Sensors 2005, Irvine, CA, USA, October 30-November 3, 2005.
5. A. R. Schofield, A. A. Trusov, C. Acar, and A. M. Shkel, "Anti-phase driven rate gyroscope with multi-degree of freedom sense mode," in The 14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '07), Lyon, France, June 10-14, 2007.