New architectural design of a temperature robust mems gyroscope with improved gain-bandwidth characteristics

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 14-17

  Trusov, A A ^a   Schofield, A R ^a   Shkel, A M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BANDWIDTH; DEGREES OF FREEDOM (MECHANICS); GYROSCOPES; MICROSYSTEMS;

DYNAMIC VIBRATION ABSORBER; ENVIRONMENTAL CONDITIONS; FABRICATION IMPERFECTIONS; OPERATIONAL FREQUENCY; PROPOSED ARCHITECTURES; RATE SENSITIVITY; SINGLE DEGREE OF FREEDOMS; TEMPERATURE COEFFICIENT;

SOLID-STATE SENSORS;

EID: 84873975901     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.4     Document Type: Conference Paper

References (9)

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8. W.-T. Sung, S. Sung, J. G. Lee, and T. Kang, "Design and Performance Test of a MEMS Vibratory Gyroscope with a Novel AGC Force Rebalance Control," J of Micromechanics and Microengineering, 17, 10 (2007).
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