Micromechanical resonator with ultra-high quality factor

Electronics Letters

Volumn 43, Issue 20, 2007, Pages 1090-1092

  Palaniapan, M ^a   Khine, L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC IMPEDANCE; ELECTRONIC EQUIPMENT; HIGH PRESSURE EFFECTS; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS;

AMBIENT PRESSURES; BULK MODE RESONATOR; QUALITY FACTOR;

RESONATORS;

EID: 34748920957     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20072424     Document Type: Article

References (5)

1. Bhave, S.A., Gao, D., Maboudian, R., and Howe, R.T.: ' Fully differential poly-SiC Lamé-mode resonator and checkerboard filter ', IEEE MEMS Conf., Miami, FL, USA, 2005
2. Clark, J.R., Hsu, W.T., Abdelmoneum, M.A., and Nguyen, C.T.C.: ' High-Q UHF micromechanical radial-contour mode disk resonators ', J. MEMS, 2005, 14, (6), p. 1293-1310
3. Lin, Y.-W., Lee, S., Li, S.S., Xie, Y., Ren, Z., and Nguyen, C.T.C.: ' Series-resonant VHF micromechanical resonator reference oscillators ', IEEE J. Solid-State Circuits, 2004, 39, (12), p. 2477-2491 10.1109/JSSC.2004.837086 0018-9200
4. Mattila, T., Kiihamaki, J., Lamminmaki, T., Jaakkola, O., Rantakari, P., Oja, A., Seppa, H., Kattelus, H., and Tittonen, I.: ' A 12MHz micromechanical bulk acoustic mode oscillator ', Sens. Actuators A, 2002, 101, (1-2), p. 1-9
5. Kaajakari, V., Mattila, T., Oja, A., Kiihamaki, J., and Seppa, H.: ' Square-extensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications ', IEEE Electron Device Lett., 2004, 25, (4), p. 173-175 0741-3106