Micromachined Angular Rate Sensors for Automotive Applications

IEEE Sensors Journal

Volumn 7, Issue 2, 2007, Pages 302-309

  Willig, Rainer ^a   Bauer, Wolfram ^a   Classen, Johannes ^a   Esch, Ermin ^a   Kuhlmann, Burkhard ^a   Veith, Michael ^a  

^a ROBERT BOSCH GMBH   (Germany)

^b BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

Author keywords

Angular rate sensor; gyroscope microelectromechanical systems (MEMS); vehicle dynamics control

Indexed keywords

EID: 85008044992     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2006.888610     Document Type: Article

References (10)

1. E. K. Liebemann, K. Meder, J. Schuh, and G. Nenninger, “Safety and performance enhancement: The Bosch electronic stability control (ESP),” presented at the SAE Convergence 2004 Conf. Detroit, MI, Oct. 2004, Tech. Paper 2004-21-0060.
2. A. Reppich and R. Willig, Yaw rate sensor for vehicle dynamics control systems SAE, Warrendale, PA, SAE Tech. Paper 950537, 1995.
3. M. Lutz, W. Golderer, J. Gerstenmeier, J. Marek, B. Maihofer, S. Mahler, H. Miinzel, and U. Bischof, “A precision yaw rate sensor in silicon micromachining,” in Proc. Transducers '97, Chicago, IL, Jun. 1997, pp. 847–850.
4. A. Thomae, R. Schellin, M. Lang, W. Bauer, J. Mohaupt, G. Bischopink, L. Tanten, H. Baumann, H. Emmerich, S. Pinter, K. Funk, G. Lorenz, R. Neul, and J. Marek, “A low cost angular rate sensor in Si-surface micromachining technology for automotive applications,” presented at the SAE 1999 World Congr., Detroit, MI, Mar. 1999, Tech. Paper 1999-01-0931.
5. R. Willig and M. Morbe, “New generation of inertial sensor cluster for ESP-and future vehicle stabilizing systems in automotive applications,” in Proc. of AMAA Conf. Advanced Microsystems for Automotive Applications, Berlin, Germany, 2003.
6. U. Gúmez, B. Kuhlmann, J. Classen, W. Bauer, C. Lang, M. Veith, E. Esch, J. Frey, F. Grabmaier, K. Offterdinger, T. Raab, R. Willig, and R. Neul, “New surface micromachined angular rate sensor for vehicle stabilizing systems in automotive applications,” in Proc. Transducers '05, Seoul, Korea, Jun. 2005, pp. 184–187.
7. R. Neul, U. Gomez, K. Kehr, W. Bauer, J. Classen, C. Doring, E. Esch, S. Götz, J. Hauer, B. Kuhlmann, C. Lang, M. Veith, and R. Willig, “Micromachined gyros for automotive applications,” in Proc. 4th IEEE Conf. Sensors, Irvine, CA, 2005, pp. 527–530.
8. M. Offenberg, F. Larmer, B. Elsner, H. Münzel, and W. Riethmiiller, “Novel process for a monolithic integrated accelerometer,” in Tech. Dig. Transducers '95 and Eurosensors IX, Stockholm, Sweden, Jun. 25–29, 1995, pp. 589–592.
9. IEEE Standard Specification Format Guide and Test Procedure for Single-Axis Interferometric Fiber Optic Gyros, IEEE Standard 952, IEEE, Piscataway, NJ, 1997.
10. H. Rödjegård, D. Sandstrom, P. Pelin, N. Hedenstierna, D. Eckerbert, and G. I. Andersson, “A digitally controlled mems gyroscope with 3.2 °/h stability,” in Proc. Transducers'05, Seoul, Korea, Jun. 2005, pp. 535–538.