Phase stabilities of self-organized nc-TiN/a-Si3N4 nanocomposites and of Ti1 - xSixNy solid solutions studied by ab initio calculation and thermodynamic modeling

Thin Solid Films

Volumn 516, Issue 8, 2008, Pages 2264-2275

  Zhang, R F ^a   Veprek, S ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Ab initio calculation; nc TiN a Si3N4 nanocomposites; Phase segregation; Thermodynamic modeling; Ti Si N solid solution

Indexed keywords

GIBBS FREE ENERGY; NANOCOMPOSITES; PARAMETER ESTIMATION; PHYSICAL VAPOR DEPOSITION; THERMODYNAMICS;

AB INITIO METHOD; PHASE SEGREGATION; THERMODYNAMIC MODELING;

PHASE STABILITY;

EID: 38649108161     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.134     Document Type: Article

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