Possible role of oxygen impurities in degradation of nc-TiN/a- Si 3 N4 nanocomposites

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages

  Veprek, Stan ^a   Karvankova, Pavla ^a   Veprek Heijman, Maritza G J ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; CHEMICAL BONDS; DEGRADATION; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; OXYGEN; TITANIUM ALLOYS;

ELECTRONIC EFFECTS; METALLIC ALLOYS; NANOCRYSTALS; OXYGEN IMPURITIES;

IMPURITIES;

EID: 29044449947     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2131086     Document Type: Article

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