Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance

Solid State Phenomena

Volumn 127, Issue , 2007, Pages 31-36

  Musil, J ^a   Zeman, P ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

DC reactive magnetron sputtering; Mechanical properties; Microstructure; Oxidation resistance; Structure; Surface morphology

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; OXIDATION RESISTANCE; REACTIVE SPUTTERING; SILICON COMPOUNDS; SURFACE MORPHOLOGY; THERMODYNAMIC STABILITY;

NANOCOMPOSITE COATINGS; REACTIVE MAGNETRON SPUTTERING;

NANOCOMPOSITES;

EID: 36048954484     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-33-7.31     Document Type: Conference Paper

References (9)

1. H. Zeman, J. Musil and P. Zeman: J. Vac. Sci. Technol. A22(3) (2004), p. 646
2. J. Musil, R. Daniel, P. Zeman and O. Takai: Thin Solid Films 478 (2005), p. 238
3. J. Musil, P. Dohnal and P. Zeman: J. Vac. Sci. Technol. B23(4) (2005), p. 1568
4. J. Musil, R. Daniel, J. Soldan and P. Zeman: Surf. Coat. Technol. 200 (2006), p. 3886
5. P. Zeman, J. Musil and R. Daniel: Surf. Coat. Technol. 200 (2006), p. 4091
6. P. Zeman and J. Musil: Appl. Surf. Sci. (2005), in press.
7. J. Musil: Physical and mechanical properties of hard nanocomposite films prepared by reactive magnetron sputtering, Chapter 10 in the book "Nanostructured Hard Coatings", A. Cavaleiro, J.Th.M. De Hosson(Eds.), Kluiwer Academic/Plenum Publishers, 2005, New York, USA.
8. J. Vlcek, S. Potocky, J. Cizek, J. Houska, M. Kormunda, P. Zeman, V. Perina, J. Zemek, Y. Setsuhara, S. Konuma: J. Vac. Sci. Technol. A23(6) (2005), p. 1513
9. R. Daniel, J. Musil, P. Zeman and C. Mitterer: submitted to Surf. Coat. Technol. (2006)