Vapor-phase self-assembled monolayers for anti-stiction applications in MEMS

Journal of Microelectromechanical Systems

Volumn 16, Issue 6, 2007, Pages 1451-1460

  Zhuang, Yan Xin ^a   Hansen, Ole ^a   Knieling, Thomas ^b,c   Wang, Christian ^d   Rombach, Pirmin ^d   Lang, Walter ^b   Benecke, Wolfgang ^b   Kehlenbeck, Markus ^b,e   Koblitz, Jörn ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b UNIVERSITY OF BREMEN   (Germany)

^c FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^d Sonion A/S   (Denmark)

^e Hella Fahrzeugkomponenten GmbH   (Germany)

Author keywords

Adhesion; Anti stiction; Assembly; Friction; Self assembled monolayer (SAM); Thermal stability; Vapor phase

Indexed keywords

CONTACT ANGLE; FRICTION; SELF ASSEMBLED MONOLAYERS; SUBSTRATES; SURFACE ROUGHNESS; THERMODYNAMIC STABILITY; VAPOR PHASE EPITAXY;

ANTI-STICTION APPLICATIONS; ORGANOSILANE;

MEMS;

EID: 36949039945     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.904342     Document Type: Article

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