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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 3, 2005, Pages 434-439

Wettability and thermal stability of fluorocarbon films deposited by deep reactive ion etching

(2) Zhuang, Yan Xin a Menon, Aric a

a TECHNICAL UNIVERSITY OF DENMARK (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; CONTACT ANGLE; DECOMPOSITION; HYDROPHOBICITY; INTERFACIAL ENERGY; MICROELECTROMECHANICAL DEVICES; PASSIVATION; REACTIVE ION ETCHING; THERMODYNAMIC STABILITY; THIN FILMS; WETTING;

ANTISTICTION COATING; FLUOROCARBON FILMS; WETTABILITY;

FLUOROCARBONS;

EID: 22144460639 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1875232 Document Type: Article

Times cited : (26)

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