Liquid and vapor phase silanes coating for the release of thin film MEMS

IEEE Transactions on Device and Materials Reliability

Volumn 5, Issue 2, 2005, Pages 250-254

  Parvais, B ^a   Pallandre, A ^a,b   Jonas, A M ^a   Raskin, J P ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

^b INSTITUT CURIE   (France)

Author keywords

Hydrophobization; MEMS; Release process; Silane; Stiction; Thin films

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MONOLAYERS; RELIABILITY; SILANES; SILICON WAFERS; STICTION; THIN FILMS; X RAY ANALYSIS;

HYDROPHOBIZATION; MEMS; RELEASE PROCESS; VAPOR PHASE SILANES;

COATED MATERIALS;

EID: 23844492532     PISSN: 15304388     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDMR.2005.846976     Document Type: Conference Paper

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