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Journal of Photopolymer Science and Technology

Volumn 20, Issue 4, 2007, Pages 577-583

Sensitization distance and acid generation efficiency in a model system of chemically amplified electron beam resist with methacrylate backbone polymer

(4) Kozawa, Takahiro a Tagawa, Seiichi a Kai, Toshiyuki b Shimokawa, Tsutomu b

a OSAKA UNIVERSITY (Japan)

b JSR CORPORATION (Japan)

Author keywords

Anion distribution; Chemically amplified resist; Line edge roughness; Polymethylmethacrylate; Sensitization distance

Indexed keywords

EID: 35948956844 PISSN: 09149244 EISSN: 13496336 Source Type: Journal
DOI: 10.2494/photopolymer.20.577 Document Type: Article

Times cited : (61)

References (55)

1
- 0026981750
- T. Kozawa, Y. Yoshida, M. Uesaka and S. Tagawa, Jpn. J. Appl. Phys. 31 (1992) 4301.
- (1992) Jpn. J. Appl. Phys , vol.31 , pp. 4301
- Kozawa, T.¹ Yoshida, Y.² Uesaka, M.³ Tagawa, S.⁴

2
- 0000843929
- S. Tagawa, S. Nagahara, T. Iwamoto, M. Wakita, T. Kozawa, Y. Yamamoto, D. Werst and A. D. Trifunac, Proc. SPIE 3999 (2000) 204.
- (2000) Proc. SPIE , vol.3999 , pp. 204
- Tagawa, S.¹ Nagahara, S.² Iwamoto, T.³ Wakita, M.⁴ Kozawa, T.⁵ Yamamoto, Y.⁶ Werst, D.⁷ Trifunac, A.D.⁸

3
- 33845239716
- T. Kozawa, T. Shigaki, K. Okamoto, A. Saeki, S. Tagawa, T. Kai and T. Shimokawa, J. Vac. Sci. Technol. B24 (2006) 3055.
- (2006) J. Vac. Sci. Technol , vol.B24 , pp. 3055
- Kozawa, T.¹ Shigaki, T.² Okamoto, K.³ Saeki, A.⁴ Tagawa, S.⁵ Kai, T.⁶ Shimokawa, T.⁷

4
- 33845240818
- T. Kozawa, S. Tagawa, H. Oizumi and I. Nishiyama, J. Vac. Sci. Technol. B24 (2006) L27.
- (2006) J. Vac. Sci. Technol , vol.B24
- Kozawa, T.¹ Tagawa, S.² Oizumi, H.³ Nishiyama, I.⁴

5
- 33745125054
- A. Nakano, T. Kozawa, S. Tagawa, T. Szreder, J. F. Wishart, T. Kai and T. Shimokawa, Jpn. J. Appl. Phys. 45 (2006) L197.
- (2006) Jpn. J. Appl. Phys , vol.45
- Nakano, A.¹ Kozawa, T.² Tagawa, S.³ Szreder, T.⁴ Wishart, J.F.⁵ Kai, T.⁶ Shimokawa, T.⁷

6
- 0004932883
- B. L. Henke, E. M. Gullikson and J. C. Davis, At. Data Nucl. Data Tables 54 (1993) 181.
- (1993) At. Data Nucl. Data Tables , vol.54 , pp. 181
- Henke, B.L.¹ Gullikson, E.M.² Davis, J.C.³

7
- 0000710674
- T. Kozawa, S. Nagahara, Y. Yoshida and S. Tagawa, J. Vac. Sci. Technol. B15 (1997) 2582.
- (1997) J. Vac. Sci. Technol , vol.B15 , pp. 2582
- Kozawa, T.¹ Nagahara, S.² Yoshida, Y.³ Tagawa, S.⁴

8
- 0343007082
- W. Hinsberg, F. A. Houle, J. Hoffnagle, M. Sanchez, G. Wallraff, M. Morrison and S. Frank, J. Vac. Sci. Technol. B16 (1998) 3689.
- (1998) J. Vac. Sci. Technol , vol.B16 , pp. 3689
- Hinsberg, W.¹ Houle, F.A.² Hoffnagle, J.³ Sanchez, M.⁴ Wallraff, G.⁵ Morrison, M.⁶ Frank, S.⁷

9
- 24644487409
- G. W. Reynolds and J. W. Taylor, J. Vac. Sci. Technol. B17 (1999) 334.
- (1999) J. Vac. Sci. Technol , vol.B17 , pp. 334
- Reynolds, G.W.¹ Taylor, J.W.²

10
- 0035519476
- J. Shin, G. Han, Y. Ma, K. Moloni and F. Cerrina, J. Vac. Sci. Technol. B19 (2001) 2890.
- (2001) J. Vac. Sci. Technol , vol.B19 , pp. 2890
- Shin, J.¹ Han, G.² Ma, Y.³ Moloni, K.⁴ Cerrina, F.⁵

11
- 0041862564
- H. Fukuda, Jpn. J. Appl. Phys. 42 (2003) 3748.
- (2003) Jpn. J. Appl. Phys , vol.42 , pp. 3748
- Fukuda, H.¹

12
- 0035982537
- M. Yoshizawa and S. Moriya, J. Vac. Sci. Technol. B20 (2002) 1342.
- (2002) J. Vac. Sci. Technol , vol.B20 , pp. 1342
- Yoshizawa, M.¹ Moriya, S.²

13
- 0001013074
- T. Yamaguchi, H. Namatsu, M. Nagase, K. Yamazaki, and K. Kurihara, Appl. Phys. Lett. 71 (1997) 2388.
- (1997) Appl. Phys. Lett , vol.71 , pp. 2388
- Yamaguchi, T.¹ Namatsu, H.² Nagase, M.³ Yamazaki, K.⁴ Kurihara, K.⁵

14
- 33645244137
- T. Kozawa and S. Tagawa, J. Appl. Phys. 99 (2006) 054509.
- (2006) J. Appl. Phys , vol.99 , pp. 054509
- Kozawa, T.¹ Tagawa, S.²

15
- 0036614041
- T. Kozawa, A. Saeki, Y. Yoshida and S. Tagawa, Jpn. J. Appl. Phys. 41 (2002) 4208.
- (2002) Jpn. J. Appl. Phys , vol.41 , pp. 4208
- Kozawa, T.¹ Saeki, A.² Yoshida, Y.³ Tagawa, S.⁴

16
- 0942289187
- T. Kozawa, A. Saeki, A. Nakano, Y. Yoshida and S. Tagawa, J. Vac. Sci. Technol. B21 (2003) 3149.
- (2003) J. Vac. Sci. Technol , vol.B21 , pp. 3149
- Kozawa, T.¹ Saeki, A.² Nakano, A.³ Yoshida, Y.⁴ Tagawa, S.⁵

17
- 29044442383
- T. Kozawa, H. Yamamoto, A. Saeki and S. Tagawa, J. Vac. Sci. Technol. B23 (2005) 2716.
- (2005) J. Vac. Sci. Technol , vol.B23 , pp. 2716
- Kozawa, T.¹ Yamamoto, H.² Saeki, A.³ Tagawa, S.⁴

18
- 33845275390
- A. Saeki, T. Kozawa, S. Tagawa and H. B. Cao, J. Vac. Sci. Tehcnol. B24 (2006) 3066.
- A. Saeki, T. Kozawa, S. Tagawa and H. B. Cao, J. Vac. Sci. Tehcnol. B24 (2006) 3066.

19
- 33749015984
- A. Nakano, T. Kozawa, K. Okamoto, S. Tagawa, T. Kai and T. Shimokawa, Jpn. J. Appl. Phys. 45 (2006) 6866.
- (2006) Jpn. J. Appl. Phys , vol.45 , pp. 6866
- Nakano, A.¹ Kozawa, T.² Okamoto, K.³ Tagawa, S.⁴ Kai, T.⁵ Shimokawa, T.⁶

20
- 4644363283
- A. Nakano, K. Okamoto, T. Kozawa and S. Tagawa, Jpn. J. Appl. Phys. 43 (2004) 4363.
- (2004) Jpn. J. Appl. Phys , vol.43 , pp. 4363
- Nakano, A.¹ Okamoto, K.² Kozawa, T.³ Tagawa, S.⁴

21
- 4444245821
- A. Nakano, K. Okamoto, T. Kozawa, and S. Tagawa, Jpn. J. Appl. Phys. 43 (2004) 3981.
- (2004) Jpn. J. Appl. Phys , vol.43 , pp. 3981
- Nakano, A.¹ Okamoto, K.² Kozawa, T.³ Tagawa, S.⁴

22
- 31844448318
- A. Nakano, K. Okamoto, Y. Yamamoto, T. Kozawa, S. Tagawa, T. Kai and H. Nemoto, Jpn. J. Appl. Phys. 44 (2005) 5832.
- (2005) Jpn. J. Appl. Phys , vol.44 , pp. 5832
- Nakano, A.¹ Okamoto, K.² Yamamoto, Y.³ Kozawa, T.⁴ Tagawa, S.⁵ Kai, T.⁶ Nemoto, H.⁷

23
- 33746809013
- T. Shigaki, K. Okamoto, T. Kozawa, H. Yamamoto, S. Tagawa, T. Kai and T. Shimokawa, Jpn. J. Appl. Phys. 45 (2006) 5735.
- (2006) Jpn. J. Appl. Phys , vol.45 , pp. 5735
- Shigaki, T.¹ Okamoto, K.² Kozawa, T.³ Yamamoto, H.⁴ Tagawa, S.⁵ Kai, T.⁶ Shimokawa, T.⁷

24
- 13244273811
- T. Kozawa, A. Saeki and S. Tagawa, J. Vac. Sci. Technol. B22 (2004) 3489.
- (2004) J. Vac. Sci. Technol , vol.B22 , pp. 3489
- Kozawa, T.¹ Saeki, A.² Tagawa, S.³

25
- 0036614662
- A. Saeki, T. Kozawa, Y. Yoshida and S. Tagawa, Jpn. J. Appl. Phys. 41 (2002) 4213.
- (2002) Jpn. J. Appl. Phys , vol.41 , pp. 4213
- Saeki, A.¹ Kozawa, T.² Yoshida, Y.³ Tagawa, S.⁴

26
- 0347381324
- K. Okamoto, A. Saeki, T. Kozawa, Y. Yoshida and S. Tagawa, Chem. Lett. 32 (2003) 834.
- (2003) Chem. Lett , vol.32 , pp. 834
- Okamoto, K.¹ Saeki, A.² Kozawa, T.³ Yoshida, Y.⁴ Tagawa, S.⁵

27
- 3142514192
- T. Kozawa, H. Yamamoto, A. Nakano, A. Saeki, K. Okamoto and S. Tagawa, J. Photopolym. Sci. Technol. 17 (2004) 449.
- (2004) J. Photopolym. Sci. Technol , vol.17 , pp. 449
- Kozawa, T.¹ Yamamoto, H.² Nakano, A.³ Saeki, A.⁴ Okamoto, K.⁵ Tagawa, S.⁶

28
- 0016526028
- F. H. Dill, W. P. Hornberger, P. S. Hauge and J. M. Shaw, IEEE Trans. Electron Dev. ED-22 (1975) 445.
- (1975) IEEE Trans. Electron Dev , vol.ED-22 , pp. 445
- Dill, F.H.¹ Hornberger, W.P.² Hauge, P.S.³ Shaw, J.M.⁴

29
- 0000166564
- N. P. Hacker and K. M. Welsh, ACS Symp. Ser. 236 (1993) 557.
- (1993) ACS Symp. Ser , vol.236 , pp. 557
- Hacker, N.P.¹ Welsh, K.M.²

30
- 0342674708
- G. C. Abel and K. Funabashi, J. Chem. Phys. 58 (1973) 1079.
- (1973) J. Chem. Phys , vol.58 , pp. 1079
- Abel, G.C.¹ Funabashi, K.²

31
- 0000366036
- T. Goulet, I. Mattel and J. P. Jay-Gerin, Can. J. Phys. 68 (1990) 912.
- (1990) Can. J. Phys , vol.68 , pp. 912
- Goulet, T.¹ Mattel, I.² Jay-Gerin, J.P.³

32
- 36149016302
- L. Onsager, Phys. Rev. 54 (1938) 554.
- (1938) Phys. Rev , vol.54 , pp. 554
- Onsager, L.¹

33
- 33847384926
- K. Okamoto, T. Kozawa, A. Saeki, Y. Yoshida and S. Tagawa, Radiat. Phys. Chem. 76 (2007) 818.
- (2007) Radiat. Phys. Chem , vol.76 , pp. 818
- Okamoto, K.¹ Kozawa, T.² Saeki, A.³ Yoshida, Y.⁴ Tagawa, S.⁵

34
- 37549028566
- Summarized in J.-P. Jay-Gerin, T. Goulet and I. Billard, Can. J. Chem. 71 (1993) 287.
- Summarized in J.-P. Jay-Gerin, T. Goulet and I. Billard, Can. J. Chem. 71 (1993) 287.

35
- 0022863449
- Y. Yoshida, S. Tagawa and Y. Tabata, Radiat. Phys. Chem. 28 (1986) 201.
- (1986) Radiat. Phys. Chem , vol.28 , pp. 201
- Yoshida, Y.¹ Tagawa, S.² Tabata, Y.³

36
- 0027557790
- Y. Yoshida, T. Ueda, T. Kobayashi, H. Shibata and S. Tagawa, Nucl. Instrum. Meth. 327 (1993) 41.
- (1993) Nucl. Instrum. Meth , vol.327 , pp. 41
- Yoshida, Y.¹ Ueda, T.² Kobayashi, T.³ Shibata, H.⁴ Tagawa, S.⁵

37
- 77949763318
- ed. D. R. Lide Taylor & Francis, Florida
- CRC Handbook of Chemistry and Physics, ed. D. R. Lide (Taylor & Francis, Florida, 2005) p. 13-13.
- (2005) CRC Handbook of Chemistry and Physics , pp. 13-13

38
- 0010320182
- G. P. Watson, D. Fu, S. D. Berger, D. Tennant, L. Fetter, A. Novembre and C. Biddick, J. Vac. Sci. Technol. B14 (1996) 4277.
- (1996) J. Vac. Sci. Technol , vol.B14 , pp. 4277
- Watson, G.P.¹ Fu, D.² Berger, S.D.³ Tennant, D.⁴ Fetter, L.⁵ Novembre, A.⁶ Biddick, C.⁷

39
- 30344457569
- T. Shigaki, K. Okamoto, T. Kozawa, H. Yamamoto and S. Tagawa, Jpn. J. Appl. Phys. 44 (2005) L1298.
- (2005) Jpn. J. Appl. Phys , vol.44
- Shigaki, T.¹ Okamoto, K.² Kozawa, T.³ Yamamoto, H.⁴ Tagawa, S.⁵

40
- 0000592477
- M. Ogasawra, M. Tanaka and H. Yoshida, J. Phys. Chem. 91 (1987) 937.
- (1987) J. Phys. Chem , vol.91 , pp. 937
- Ogasawra, M.¹ Tanaka, M.² Yoshida, H.³

41
- 0025409827
- T. Ichikawa and H. Yoshida, J. Polym. Sci. A28 (1990) 1185.
- (1990) J. Polym. Sci , vol.A28 , pp. 1185
- Ichikawa, T.¹ Yoshida, H.²

42
- 0020846466
- M. Tabata, G. Nillson, A. Lund and J. Sohma, J. Polym. Sci. Polym. Chem. Ed. 21 (1983) 3257.
- (1983) J. Polym. Sci. Polym. Chem. Ed , vol.21 , pp. 3257
- Tabata, M.¹ Nillson, G.² Lund, A.³ Sohma, J.⁴

43
- 84989737672
- W. Sakai, A. Tsuchida, M. Yamamoto and J. Yamauchi, J. Polym. Sci. A33 (1995) 1969.
- (1995) J. Polym. Sci , vol.A33 , pp. 1969
- Sakai, W.¹ Tsuchida, A.² Yamamoto, M.³ Yamauchi, J.⁴

44
- 0006486316
- R. B. Fox, L. G. Isaacs and S. Stokes, J. Polym. Sci. A1 (1963) 1079.
- (1963) J. Polym. Sci. A1 , pp. 1079
- Fox, R.B.¹ Isaacs, L.G.² Stokes, S.³

45
- 0001254474
- A. Gupta, R. Liang, F. D. Tsay and J. Moacanin, Macromolecules 13 (1980) 1696.
- (1980) Macromolecules , vol.13 , pp. 1696
- Gupta, A.¹ Liang, R.² Tsay, F.D.³ Moacanin, J.⁴

46
- 0025174576
- A. Torikai, M. Ohno and K. Fueki, J. Appl. Polym. Sci. 41 (1990) 1023.
- (1990) J. Appl. Polym. Sci , vol.41 , pp. 1023
- Torikai, A.¹ Ohno, M.² Fueki, K.³

47
- 0037159837
- S. Tatro, G. Baker, K. Bisht and J. Harmon, Polymer 44 (2003) 167.
- (2003) Polymer , vol.44 , pp. 167
- Tatro, S.¹ Baker, G.² Bisht, K.³ Harmon, J.⁴

48
- 21544438001
- W. Chen and H. Ahmed, Appl. Phys. Lett. 62 (1993) 1499.
- (1993) Appl. Phys. Lett , vol.62 , pp. 1499
- Chen, W.¹ Ahmed, H.²

49
- 0001221538
- D. R. S. Cumming, S. Thorns, S. P. Beaumont and J. M. R. Weaver, Appl. Phys. Lett. 68 (1996) 322.
- (1996) Appl. Phys. Lett , vol.68 , pp. 322
- Cumming, D.R.S.¹ Thorns, S.² Beaumont, S.P.³ Weaver, J.M.R.⁴

50
- 0035971781
- S. Yasin, D. G. Hasko and H. Ahmed, Appl. Phys. Lett. 78 (2001) 2760.
- (2001) Appl. Phys. Lett , vol.78 , pp. 2760
- Yasin, S.¹ Hasko, D.G.² Ahmed, H.³

51
- 0025090091
- M. Tanaka, H. Yoshida and T. Ichikawa, Polym. J. 22 (1990) 835.
- (1990) Polym. J , vol.22 , pp. 835
- Tanaka, M.¹ Yoshida, H.² Ichikawa, T.³

52
- 0000998586
- G. Geuskens and C. David, Makromol. Chem. 165 (1973) 273.
- (1973) Makromol. Chem , vol.165 , pp. 273
- Geuskens, G.¹ David, C.²

53
- 0040255844
- P. Y. Butyagin, A. M. Dubinskaya and V. A. Radtsig, Russ. Chem. Rev. 38 (1969) 290.
- (1969) Russ. Chem. Rev , vol.38 , pp. 290
- Butyagin, P.Y.¹ Dubinskaya, A.M.² Radtsig, V.A.³

54
- 0003673462
- Wiley, New York
- A. Chapiro, Radiation Chemistry of Polymeric Systems (Wiley, New York, 1962) p. 515.
- (1962) Radiation Chemistry of Polymeric Systems , pp. 515
- Chapiro, A.¹

55
- 23944461498
- T. Kozawa, K. Okamoto, A. Saeki and S. Tagawa, Jpn. J. Appl. Phys. 44 (2005) 3908.
- (2005) Jpn. J. Appl. Phys , vol.44 , pp. 3908
- Kozawa, T.¹ Okamoto, K.² Saeki, A.³ Tagawa, S.⁴

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