Nanometer-scale linewidth fluctuations caused by polymer aggregates in resist films

Applied Physics Letters

Volumn 71, Issue 16, 1997, Pages 2388-2390

  Yamaguchi, Toru ^a   Namatsu, Hideo ^a   Nagase, Masao ^a   Yamazaki, Kenji ^a   Kurihara, Kenji ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001013074     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120037     Document Type: Article

References (8)

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