Sensor fabrication using thin film-on-silicon approaches

Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 157-163

  Muller G ^a   Deimel, P P ^a   Hellmich, W ^a   Wagner, C ^a  

^a DAIMLER AG   (Germany)

Author keywords

Optoelectronics; Sensor fabrication; Silicon wafers

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTOELECTRONIC DEVICES; SILICON SENSORS;

MICROMACHINED MECHANICAL STRUCTURES; MONOCRYSTALLINE SILICON WAFERS;

SILICON WAFERS;

EID: 0031100879     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09338-8     Document Type: Article

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