Temperature calibration of heated silicon atomic force microscope cantilevers

Sensors and Actuators, A: Physical

Volumn 140, Issue 1, 2007, Pages 51-59

  Nelson, B A ^a   King, W P ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Atomic force microscopy; Microcantilever; Microheater; Raman; Thermal sensors; Thermometry

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; HEAT TRANSFER; SILICON; THERMOMETERS;

ISOTHERMAL CALIBRATION; MICROCANTILEVERS; MICROHEATERS; TEMPERATURE CALIBRATION;

TEMPERATURE SENSORS;

EID: 34548499127     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.06.008     Document Type: Article

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