Micro-Raman thermometry of thermal flexure actuators

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1128-1134

  Serrano, J R ^a   Phinney, L M ^a   Kearney, S P ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CONTRACTS; MATHEMATICAL MODELS; NUMERICAL METHODS; POLYSILICON; RAMAN SPECTROSCOPY; SEMICONDUCTOR MATERIALS; THERMAL EFFECTS;

MICRO-RAMAN THERMOMETRY; TEMPERATURE METRICS; TEMPERATURE-CALIBRATED RESPONSE; THERMAL PROFILES;

THERMOMETERS;

EID: 33745083069     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/004     Document Type: Article

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