VLSI-NEMS chip for parallel AFM data storage

Sensors and Actuators, A: Physical

Volumn 80, Issue 2, 2000, Pages 100-107

  Despont, M ^a   Brugger, J ^a   Drechsler, U ^a   Durig U ^a   Haberle W ^a   Lutwyche, M ^a   Rothuizen, H ^a   Stutz, R ^a   Widmer, R ^a   Binnig, G ^a   Rohrer, H ^a   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CROSSTALK; DATA STORAGE EQUIPMENT; ELECTRIC CONTACTORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOTECHNOLOGY; PLASTIC FILMS; READOUT SYSTEMS; SCHOTTKY BARRIER DIODES; THERMODYNAMIC STABILITY; VLSI CIRCUITS;

ELECTRICAL STABILITY; THERMOMECHANICAL WRITING; TIME-MULTIPLEXED METHOD;

MICROSENSORS;

EID: 0033909128     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00254-X     Document Type: Article

References (14)

1. Mamin H.J., Terris B.D., Fan L.S., Hoen S., Barrett R.C., Rugar D. High-density data storage using proximal probe techniques. IBM J. Res. Dev. 39:1995;681-700.
2. Binnig G., Despont M., Drechsler U., Häberle W., Lutwyche M., Vettiger P., Mamin H.J., Chui B.W., Kenny T.W. Ultrahigh-density atomic force microscopy data storage with erase capability. Appl. Phys. Lett. 74:1999;1329-1331.
3. Grochowski E., Hoyt R.F. Future trends in hard disk drives. IEEE Trans. Magn. 32:1996;1850-1854.
4. Ried R.P., Mamin H.J., Terris B.D., Fan L.S., Rugar D. 6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with incisive tips. J. Microelectromech. Syst. 6:1997;294-302.
5. IBM US Patent 5,835,477 entitled "Mass-Storage Applications of Local Probe Arrays", issued November 10, 1998.
6. Vettiger P., Brugger J., Despont M., Drechsler U., Dürig U., Häberle W., Lutwyche M., Rothuizen H., Stutz R., Widmer R., Binnig G. Ultrahigh density, high-data-rate NEMS-based AFM data storage system. Microelectron. Eng. 46:1999;11-17.
7. Minne S.C., Yaralioglu G., Manalis S.R., Adams J.D., Atalar A., Quate C.F. Automated parallel high-speed atomic force microscopy. Appl. Phys. Lett. 72:1998;2340-2342.
8. N.C. MacDonald, Nanomechanisms and tips for microinstruments, Digest of Technical Papers, 7th Int. Conf. on Solid-State Sensors and Actuators, Yokohama, Japan, June 7-10, 1993, pp. 8-12.
9. M. Lutwyche, C. Andreoli, G. Binnig, J. Brugger, U. Drechsler, W. Häberle, H. Rohrer, H. Rothuizen, and P. Vettiger, Microfabrication and parallel operation of 5×5 2D AFM cantilever array for data storage and imaging, Proc. IEEE 11th Int. Workshop on MEMS ("MEMS 98"), Heidelberg, Germany, January 1998, IEEE Computer Soc. Press, New York, 1998, pp. 8-11.
10. IBM PCT patent application with international application number PCT/IB/97/00895, entitled "Investigation and/or Manipulation Device", filed July 17, 1997.
11. B.W. Chui, H.J. Mamin, B.D. Terris, D. Rugar, K.E. Goodson, and T.W. Kenny, Micromachined heaters with 1-ls thermal time constants for AFM thermomechanical data storage, Proc. IEEE Transducers '97, Chicago, USA, June 1997.
12. Ravi T.S., Marcus R.B. Oxidation sharpening of silicon tips. J. Vac. Sci. Technol., B. 9:1991;2733-2737.
13. S.M. Sze, Physics of Semiconductors Devices, Wiley, New York, 1981.
14. M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig, H. Rohrer, P. Vettiger, VLSI-NEMS chip for AFM data storage, Technical Digest 12th IEEE Int. Micro Electro Mechanical Systems Conf. MEMS '99, Orlando, FL, January 1999, IEEE, Piscataway, 1999, pp. 564-569.