Modeling and data for thermal conductivity of ultrathin single-crystal SOI layers at high temperature

IEEE Transactions on Electron Devices

Volumn 53, Issue 8, 2006, Pages 1868-1876

  Liu, Wenjun ^a   Etessam Yazdani, Keivan ^a   Hussin, Rozana ^a   Asheghi, Mehdi ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Boltzmann transport equation (BTE); Phonon scattering; Silicon on insulator (SOI); Thermal conductivity; Thin film silicon

Indexed keywords

ALGEBRA; COMPUTER SIMULATION; DOPING (ADDITIVES); HIGH TEMPERATURE PROPERTIES; PHONONS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

BOLTZMANN TRANSPORT EQUATION (BTE); PHONON SCATTERING; THIN-FILM SILICON;

SILICON ON INSULATOR TECHNOLOGY;

EID: 33746629889     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2006.877874     Document Type: Article

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