Applications of a low contact force polyimide shank bolometer probe for chemical and biological diagnostics

Sensors and Actuators, A: Physical

Volumn 104, Issue 3, 2003, Pages 236-245

  Li, M H ^a   Gianchandani, Y B ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

Bolometer; Chemical diagnostics; Polyimide shank

Indexed keywords

BIOCHEMISTRY; CELLS; DIFFUSION; MICROMACHINING; PHOTORESISTS; POLYIMIDES; PROBES; SUBSTRATES; TUMORS;

CHEMICAL DIAGNOSTICS; LOW CONTACT FORCE POLYIMIDE SHANK BOLOMETER; NANOSCALE CHEMICAL VARIATIONS; PHOTOSENSITIVE POLYMERS;

BOLOMETERS;

EID: 0037716784     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00026-8     Document Type: Article

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