Thermal properties of thin films and problems with their determination

Annales de Chimie: Science des Materiaux

Volumn 32, Issue 4, 2007, Pages 401-420

  Bodzenta, Jerzy ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; HEAT TRANSFER; NANOSTRUCTURES; THERMAL CONDUCTIVITY;

BULK MATERIALS; INNER STRUCTURE;

THIN FILMS;

EID: 34548036468     PISSN: 01519107     EISSN: None     Source Type: Journal    
DOI: 10.3166/acsm.32.401-420     Document Type: Article

References (137)

1. C. Kittel, Introduction to solid state physics, John Wiley and Sons, New York 1956.
2. R. Berman, Thermal conduction of solids, Clarendon Press, Oxford 1976.
3. J.E. Graebner, M.E. Reiss, L. Seibles, T.M. Hartnett, R.P. Miller, C.J. Robinson, Phonon scattering in chemical-vapor-deposited diamond, Phys. Rev. B 50 (1994) 3702-3713.
4. D.T. Morelli, T.A. Perry, J.W. Farmer, Phonon scattering in lightly neutron irradiated diamond, Phys. Rev. B 47 (1993) 131-139.
5. J. Bodzenta, Influence of order-disorder transition on thermal conductivity of solids, Chaos, Solitons & Fractals 12 (1999) 2087-2098.
6. R.P. Joshi, P.G. Neudeck, C. Fazi, Analysis of the temperature dependent thermal conductivity of silicon carbide for high temperature applications, J. Appl. Phys. 88 (2000) 265-269.
7. J. Callaway, Model for lattice thermal conductivity at low temperatures, Phys. Rev. 113 (1959) 1046-1051.
8. M.G. Holland, Analysis of lattice thermal conductivity, Phys. Rev. 132 (1963) 2461-2471.
9. M. Asen-Palmer, K. Bartkowski, E. Gmelin, M. Cardona, A.P. Zhernov, A.V. Inyushkin, A. Taldenkov, V.I. Ozhogin, K.M. Itoh, E.E. Haller, Thermal conductivity of germanium crystals with different isotopic compositions, Phys. Rev. B 56 (1997) 9431-9447.
10. A. Einstein, Elementare Betrachtungen über die thermische Molekularbewegung in festen Körpern, Ann. Phys. 35 (1911) 679-694.
11. D.G. Cahill, R.O. Pohl, Heat flow and lattice vibrations in glasses, Solid State Commun. 70 (1989) 927-930.
12. D.G. Cahill, S.K. Watson, R.O. Pohl, Lower limit of the thermal conductivity of disordered crystals, Phys. Rev. B 46 (1992) 6131-6140.
13. M. Bertolotti, G.L. Liakhou, A. Ferrari, V.G. Ralchenko, A.A. Smolin, E. Obraztsova, K.G. Krotoushenko, S.M. Pimenov, V.I. Konov, Measurements of thermal conductivity of diamond films by photothermal deflection technique, J. Appl. Phys. 75 (1994) 7795-7798.
14. D.T. Morelli, C.P. Beetz, T.A. Perry, Thermal conductivity of synthetic diamond films, J. Appl. Phys. 64 (1988) 3063-3066.
15. C.J. Morath, H.J. Maris, J.J. Cuomo, D.L. Pappas, A. Grill, V.P. Patel, J.P. Doyle, K.L. Saenger, Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity, J. Appl. Phys. 76 (1994) 2636-2640.
16. J.E. Graebner, S. Jin, G.W. Kammlott, J.A. Herb, C.F. Gardinier, Unusually high thermal conductivity in diamond films, Appl. Phys. Lett. 60 (1992) 1576-1578.
17. J.E. Graebner, S. Jin, G.W. Kammlott, B. Bacon, L. Seibles, W. Banholzer, Anisotropic thermal conductivity in chemical vapor deposition diamond, J. Appl. Phys. 71 (1992) 5353-5356.
18. J.E. Graebner, J.A. Mucha, L. Seibles, G.W. Kammlott, The thermal conductivity of chemical-vapor-deposited diamond films, J. Appl. Phys. 71 (1992) 3143-3146.
19. D.T. Morelli, T.M. Hartnett, C.J. Robinson, Phonon-defect scattering in high thermal conductivity diamond films, Appl. Phys. Lett. 59 (1991) 2112-2114.
20. A.J. Bullen, K.E. O'Hara, D.G. Cahill, O. Monteiro, A. von Keudell, Thermal conductivity of amorphous carbon thin films, J. Appl. Phys. 88 (2000) 6317-6320.
21. E. Wömer, E. Pleurel, C. Wild, P. Koidl, Thermal and optical properties of high purity CVD-diamond disks doped with boron and nitrogen, Diamond Relat. Mater. 12 (2003) 744-748.
22. C.J. Tang, A.J. Neves, A.J.S. Fernandes, Growth of high quality large grained diamond films on mirror-polished silicon without surface pretreatment, Diamond Relat. Mater. 12 (2003) 251-256.
23. S.D. Wolter, D. Borca-Tasciuc, G. Chen, J.T. Prater, Z. Sitar, Processing and thermal properties of highly oriented diamond thin films, Thin Solid Films 469-470 (2004) 105-111.
24. D.T. Morelli, T.A. Perry, J.W. Vandersande, C. Uher, Glasslike thermal transport in heavily irradiated diamond, Phys. Rev. B 48 (1993) 3037-3041.
25. E. Wörner, C. Wild, W. Müller-Sebert, R. Locher, P. Koidl, Thermal conductivity of CVD diamond films: high precision, temperature-resolved measurement, Diamond Relat. Mater. 5 (1996) 688-692.
26. Z. Chen, A. Mandelis, Thermal-diffusivity measurements of ultrahigh thermal conductors with use of scanning photothermal rate-window spectrometry: Chemical-vapor-deposition diamonds, Phys. Rev. B 46 (1992) 13526-13538.
27. Y. von Kaenel, J. Stiegler, E. Blank, O. Chauvet, Ch. Hellwig, K. Plamann, Microstructure evolution and defect incorporation in highly oriented and textured CVD diamond films, Phys. Stat. Sol. (a) 154 (1996) 219238.
28. E. Jansen, O. Dorsch, E. Obermeier, W. Kulisch, Thermal conductivity measurements on diamond films based on micromechanical devices, Diamond Relat. Mater. 5 (1996) 644-648.
29. A.N. Petrovsky, A.O. Salnick, D.O. Mukhin, B.V. Spitsyn, Thermal conductivity measurements of synthetic diamond films using the photothermal beam deflection technique, Mater. Sci. Eng. B 11 (1992) 353-354.
30. Q. Shen, A. Harata, T. Sawada, Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using the transient grating technique, J. Appl. Phys. 77 (1995) 1488-1491.
31. K.E. Goodson, O.W. Käding, M. Rösier, R. Zachai, Experimental investigation of thermal conduction normal to diamond-silicon boundaries, J. Appl. Phys. 77 (1995) 1385-1392.
32. G. Lu, W.T. Swan, Measurement of thermal diffusivity of polycrystalline diamond film by the converging thermal wave technique, Appl. Phys. Lett. 59 (1991) 1556-1558.
33. J.C Lambropoulos, M.R. Jolly, C.A. Amsden, S.E. Gilman, M.J. Sinicropi, D. Diakomihalis, S.D. Jacobs, Thermal conductivity of dielectric thin films, J. Appl. Phys. 66 (1989) 4230-4242.
34. 4 thin films, J. Appl. Phys. 76 (1994) 4007-4011.
35. W. Dreyer, Materialverhalten anisotroper Festkörper: Thermische und elektrische Eigenschaften, Springer, Wien 1974 (in German).
36. T. Phan, S. Dilhaire, J.Ch. Batsale, V. Quintard, W. Claeys, Laser probing determination of the thermal conductivity of integrated circuit dielectric layers, High Temperatures - High Pressures 29 (1997) 81-88.
37. M. Okuda, S. Ohkubo, A novel method for measuring the thermal conductivity of submicrometer thick dielectric films, Thin Solid Films 213 (1992) 176-181.
38. S.-M. Lee, D.G. Cahill, T.H. Allen, Thermal conductivity of sputtered oxide films, Phys. Rev. B 52 (1995) 253257.
39. S.-M. Lee, D.G. Cahill, Heat transport in thin dielectric films, J. Appl. Phys. 81 (1997) 2590-2594.
40. A. Irace, P.M. Sarro, Measurement of thermal conductivity and diffusivity of single and multilayer membranes, Sensors & Actuators 76 (1999) 323-328.
41. K. Horai, Thermal conductivity of rock-forming minerals, J. Geophys. 76 (1971) 1278-1308.
42. E.H. Ratcliffe, Thermal conductivities of fused and crystalline quartz, Brit. J. Appl. Phys. 10 (1959) 22-25.
43. F. Birch, H. Clark, The thermal conductivity of rocks and its dependence upon temperature and composition. Part I, Am. J. Sci. 238 (1940) 529-558.
44. M. Rohde, Photoacoustic characterization of thermal transport in thin films and microstructures, Thin Solid Films 238 (1994) 199-206.
45. G. Langer, J. Hartmann, M. Reichling, Thermal conductivity of thin metallic films measured by photothermal profile analysis, Rev. Sci. Instrum. 68 (1997) 1510-1513.
46. P. Nath, K.L. Chopra, Experimental determination of thermal-conductivity of thin films, Thin Solid Films 18 (1973) 29-37.
47. B.T. Boiko, A.T. Pugachev, V.M. Bratsychin, Method for the determination of the thermophysical properties of evaporated thin films, Thin Solid Films 17 (1973) 157-161.
48. J.W. Vandersande, C. Wood, The thermal conductivity of insulators and semiconductors, Contemp. Phys. 27 (1986) 117-144.
49. Yu.I. Ravich, D.A. Pshenai-Severin, Thermoelectric figure of merit of a p-n junction, Semiconductors 35 (2001) 1161-1165.
50. W.W. Gorbatchov, L.G. Spitsyna, Physics of semiconductors and metals, Metallurgija, Moscow 1982 (in Russian).
51. J. Bodzenta, Heat transport in thin films and measurements of their thermal properties, Wydawnictow Politechniki Śla̧skiej, Gliwice 2006 (in Polish).
52. Y.C. Tai, C.H. Mastrangelo, R.S. Müller, Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films, J. Appl. Phys. 63 (1988) 1442-1447.
53. P. Nath, K.L. Chopra, Thermal conductivity of amorphous and crystalline Ge and GeTe films, Phys. Rev. B 10 (1974) 3412-3418.
54. O.W. Käding, M. Rosier, R. Zachai, H.-J. Füßer, E. Matthias, Lateral thermal diffusivity of epitaxial diamond films, Diamond Relat. Mater. 3 (1994) 1178-1182.
55. J.E. Graebner, S. Jin, G.W. Kammlott, Y.-H. Wong, J.A. Herb, C.F. Gardinier, Thermal conductivity and the microstructure of state-of-the-art chemical-vapor-deposited (CVD) diamond, Diamond Relat. Mater. 2 (1993) 1059-1063.
56. H. Verhoeven, A. Flöter, H. Reiß, R. Zachai, D. Wittorf, W. Jäger, Influence of the microstructure on the thermal properties of thin polycrystaline diamond films, Appl. Phys. Lett. 71 (1997), 1329-1331.
57. D.G. Cahill, K. Goodson, A. Majumdar, Thermometry and thermal transport in micro/nanoscale solid-state devices and structures, J. Heat Transfer 124 (2002) 223-241.
58. M.L. Huberman, A.W. Overhauser, Electronic Kapitza conductance at a diamond-Pb interface, Phys. Rev. B 50 (1994) 2865-2873.
59. A.V. Sergeev, Electronic Kapitza conductance due to inelastic electron-boundary scattering, Phys. Rev. B 58 (1998) R10199-R10202.
60. I.M. Khalatnikov, Heat exchange between a solid body and helium II, Sov. Phys. JETP 22 (1952) 687-701.
61. E.T. Swartz, R.O. Pohl, Thermal boundary resistance, Rev. Mod. Phys. 61 (1989) 605-668.
62. A. Majumdar, Microscale Heat conduction in dielectric thin films, J. Heat Transfer 115 (1993) 7-16.
63. P.B. Allen, J.L. Feldman, Thermal conductivity of disordered harmonic solids, Phys. Rev. B 48 (1993) 12581-12588.
64. D.C. Rappaport, The art of molecular dynamics simulation, Cambridge University Press, Cambridge 1995.
65. P.K. Schelling, S.G. Phillpot, P. Keblinski, Comparison of atomic-level simulation method for computing thermal conductivity, Phys. Rev. B 65 (2002) 144306.
66. W. Liu, M. Ashegi, Thermal conductivity measurements of ultra-thin single crystal silicon layers, J. Heat Transfer 128 (2006) 75-83.
67. A.D. McConnell, S. Uma, K.E. Goodson, Thermal conductivity of doped polysilicon layers, J. Microelectromech. Syst. 10 (2001) 360-369.
68. M. Ashegi, K. Kurabayashi, R. Kasnavi, K.E. Goodson, Thermal conduction in doped single crystal silicon films, J. Appl. Phys. 91 (2002) 5079-5088.
69. S.-M. Lee, D.G. Cahill, T.H. Allen, Heat transport in thin dielectric films, J. Appl. Phys. 81 (1997) 2590-2595.
70. D.G. Cahill, S.-M. Lee, Influence of interface conductance on the apparent thermal conductivity of thin films, Microscale Thermophysical Eng. 1 (1997) 47-52.
71. M.V. Simkin, G.D. Mahan, Minimum thermal conductivity of supelattices, Phys. Rev. Lett. 84 (2000) 927930.
72. B. Yang, G. Chen, Lattice dynamics study of anisotropic heat conduction in superlattices, Microscale Thermophysical Eng. 5 (2001) 107116.
73. S.Y. Ren, J.D. Dow, Thermal conductivity of superlattices, Phys. Rev. B 25 (1982) 3750-3755.
74. S.T. Huxtable, A.R. Abramson, A. Majumdar, C.L. Tien, C. LaBounty, X. Fan, G. Zeng, J.E. Bowers, A. Shakouri, E.T. Croke, Nanoscale thermal transport in superlattices, Proc. ASME IMECE, ASME, New York 2001.
75. X.Y. Yu, G. Chen, A. Verma, J.S. Smith, Temperature Dependence of Thermophysical properties, of GaAs/AlAs periodic thin film structures, Appl. Phys. Lett. 67 (1995) 3554-3556.
76. S.-M. Lee, D.G. Cahill, R. Venkatasubramanian, Thermal conductivity of Si-Ge superlattices, Appl. Phys. Lett. 70 (1997) 2957-2959.
77. G. Chen, C.L. Tien, Thermal conductivities of quantum well structures, J. Thermophys. Heat Transfer 7 (1993) 311-318.
78. T. Yao, Thermal properties of AlAs/GaAs superlattices, Appl. Phys. Lett. 51 (1987) 1798-1800.
79. W.S. Capinski, H.J. Maris, M. Cardona, D.S. Katzer, K. Ploog, T. Ruf, Thermal conductivity of GaAs/AlAs superlattices, Physica B 263-264 (1999) 530-532.
80. S.T. Huxtable, A.R. Abramson, C.L. Tien, A. Majumdar, C. LaBounty, X. Fan, G. Zeng, J.E. Bowers, A. Shakouri, E.T. Croke, Thermal conductivity of Si/SiGe and SiGe/SiGe superlattices, Appl. Phys. Lett. 80 (2002) 1737-1739.
81. T. Borca-Tasciuc, W. Liu, J. Liu, T. Zeng, D.W. Song, C.D. Moore, G. Chen, K.L. Wang, M. Goorsky, T. Redetic, R. Gronsky, T. Koga, M.S. Dresselhaus, Thermal conductivity of symmetrically strained Si/Ge superlattices, Superlattices Microstruct. 28 (2000) 199-206.
82. 3 superlattices, J. Appl. Phys. 90 (2001) 763-767.
83. 3 nanolaminates, Science 303 (2004) 989-990.
84. S. Yang, P.A. Mirau, C.S. Pai, O. Nalamasu, E. Reichmanis, J.C. Pai, Y.S. Obeng, J. Seputro, E.K. Lin, H.J. Lee, J.N. Sun, D.W. Gidley, Nano-porous ultralow dielectric constant organosilicates templated by triblock copolymers, Chem. Mater. 14 (2002) 369-374.
85. Ch. Hu, M. Morgen, P.S. Ho, A. Jain, W.N. Gill, J.L. Plawsky, P.C. Wayner. Jr., Thermal conductivity study of porous low-k dielectric materials, Appl. Phys. Lett. 77 (2000) 145-147.
86. R.M. Costescu, A.J. Bullen, G. Matamis, K.E. O'Hara, D.G. Cahill, Thermal conductivity and sound velocities of hydrogen-silsequioxane low-k dielectrics, Phys. Rev. B 65 (2002) 94205.
87. B.C. Daly, G.A. Antonelli, H.J. Maris, W.K. Ford, L. Wong, E. Andideh, Measurements of the thermal conductivity of amorphous materials with low dielectric constants, Physica B 316-317 (2002) 254-257.
88. S. Berber, Y.-K. Kwon, D. Tománek, Unusually high thermal conductivity of carbon nanotubes, Phys. Rev. Lett. 84 (2000) 4613-4616.
89. M.A. Osman, D. Srivastava, Temperature dependence of the thermal conductivity of single-wall carbon nanotubes, Nanotechnology 12 (2001) 21-24.
90. J. Hone, M. Whitney, C. Piskoti, A. Zettl, Thermal conductivity of single-wall carbon nanotubes, Phys. Rev. B 59 (1999) R2514-R2516.
91. T.Y. Choi, D. Poulikakos, J. Tharian, U. Sennhauser, Measurement of thermal conductivity of individual multiwalled carbon nanotubes by the 3ω-method, Appl. Phys. Lett. 87 (2005) 013108.
92. Q. Gong, Z. Li, X. Bai, D. Li, Y. Zhao, J. Liang, Thermal properties of aligned carbon nanotube/carbon nanocomposites, Mater. Sci. Eng. A 384 (2004) 209-214.
93. C.W. Chang, W.-Q. Han, A. Zetti, Thermal conductivity of B-C-N and BN nanotubes, Appl. Phys. Lett. 86 (2005) 173102.
94. S.G. Walkauskas, D.A. Broido, K. Kempa, T.L. Reinecke, Lattice thermal conductivity of wires, J. Appl. Phys. 85 (1999) 2579-2582.
95. S.G. Voltz, G. Chen, Molecular dynamics simulation of thermal conductivity of silicon nanowires, Appl. Phys. Lett. 75 (1999) 2056-2058.
96. W.-S. Jiaung, J.-R. Ho, Lattice Boltzmann study on size effect with geometrical bending on phonon heat conduction in a nanoduct, J. Appl. Phys. 95 (2004) 958-966.
97. G.D. Mahan, Hot electrons in one dimension, J. Appl. Phys. 58 (1985) 2242-2251.
98. J. Lai, A. Majumdar, Concurrent thermal and electrical modeling of sub-micrometer silicon devices, J. Appl. Phys. 79 (1996) 7353-7361.
99. P.G. Sverdrup, Y.S. Ju, K.E. Goodson, Sub-continuum simulations of heat conduction in silicon-on-insulator transistors, J. Heat Transfer 123 (2001) 130-136.
100. P.G. Sverdrup, S. Sinha, M. Asheghi, U. Srinivasan, K.E. Goodson, Measurement of ballistic phonon conduction near hotspots in silicon, Appl. Phys. Lett. 78 (2001) 3331-3333.
101. K. Seeger, Semiconductor physics, Springer Series in Solid State Physics vol. 40, Springer, Berlin 1985.
102. E. Janses, E. Obermeier, Measurements of the thermal conductivity of CVD diamond films, phys. stat. sol. (a) 154 (1996) 395-402.
103. C. Wagner, G. Krötz, Thermal properties of β-SiC epitaxial layers between 150°C and 500°C measured by using microstructures, Diamond Relat. Mater. 6 (1997) 1338-1341.
104. P. Kim, L. Shi, A. Majumdar, P.L. McEuen, Thermal transport measurements of individual multiwalled nanotubes, Phys Rev. Lett. 87 (2001) 215502.
105. J. Hartmann, P. Voigt, M. Reichling, Measuring local thermal conductivity of polycrystalline diamond with a high resolution photothermal microscope, J. Appl. Phys. 81 (1997) 2966-2972.
106. W.J. Parker, R.J. Jenkins, C.P. Butler, G.L. Abbott, Flash method of determining thermal diffusivity, heat capacity, and thermal conductivity, J. Appl. Phys. 32 (1961) 1679-1684.
107. ASTM standard: E1461-01 Standard test method for thermal diffusivity of solids by the flash method.
108. D.L. Balageas, Thermal diffusivity measurement by pulsed methods, High Temp. - High Pressures 21 (1989) 85-96.
109. R.E. Taylor, Thermal diffusivity of composites, High Temp. - High Pressures 15 (1983) 299-309.
110. S. Ahuja, W.A. Ellington, J. Stuckley, E.R. Koehl, Determining thermal diffusivity and defect attributes in ceramic matrix composites by infrared imaging, Proc. SPIE 2766 (1996) 249-257.
111. A. Salazar, F. Garrido, R. Celorrio, Thermal diffusivity of rods, tubes and spheres by the flash method, J. Appl. Phys. 99 (2006) 066116.
112. J.-C. Krapez, L. Spagnolo, M. Frieß, H.-P. Maier, G. Neuer, Measurements of in-plane diffusivity in non-homogeneous slabs by applying flash thermography, Int. J. Thermal Sci. 43 (2004) 967-977.
113. P. Cielo, L.A. Utracki, M. Lamontagne, Thermal-difrusivity measurements by the converging-thermal-wave technique, Canad. J. Phys. 64 (1986) 1172-1177.
114. C.A. Paddock, G.L. Eesley, Transient thermoreflectance from thin metal films, J. Appl. Phys. 60 (1986) 285-290.
115. B.M. Clemens, G.L. Eesley, C.A. Paddock, Time-resolved thermal transport in compositionally modulated metal films, Phys. Rev. B 37 (1988) 1085-1096.
116. N. Taketoshi, T. Baba, A. Ono, Observation of heat diffusion across submicrometer metal thin films using a picosecond thermoreflectance technique, Jpn. J. Appl. Phys. 38 (1999) L1268-L1271.
117. A.N. Smith, J.L. Hostetler, P.M. Norris, Thermal boundary resistance measurements using a transient thermoreflectance technique, Microscale Thermophys. Eng. 4 (2000) 51-60.
118. W.S. Capinski, H.J. Maris, T. Ruf, M. Cardona, K. Ploog, D. Katzer, Thermal-conductivity measurements of GaAs/AlAs superlattices using a picosecond optical pump-and-probe technique, Phys. Rev. B 59 (1999) 8105-8113.
119. D.G. Cahill, Analysis of heat flow in layered structures for time-domain thermoreflectance, Rev. Sci. Instrum. 75 (2004) 5119-5122.
120. N. Taketoshi, T. Baba, A. Ono, Electrical delay technique in the picosecond thermoreflectance method for thermophysical property measurements of thin films, Rev. Sci. Instrum. 76 (2005) 094903.
121. H. Eichler, G. Salje, H. Stahl, Thermal diffusion measurements using spatially periodic temperature distribution induced by laser light, J. Appl. Phys. 44 (1973) 5383-5388.
122. Q. Shen, A. Harata, T. Sawada, Analysis of the thermal and acoustic properties of ion-implanted diamondlike carbon films using transient reflecting grating technique, J. Appl. Phys. 77 (1995) 1488-1491.
123. J.E. Graebner, V.G. Ralchenko, A.A. Smolin, E.D. Obraztsova, K.G. Korotushenko, V.I. Konov, Thermal conductivity of thin diamond films grown from d.c. discharge, Diamond Relat. Mater. 5 (1996) 693-698.
124. O.W. Käding, H. Skurk, A.A. Maznev, E. Matthias, Transient thermal gratings at surfaces for thermal characterization of bulk materials and thin films, Appl. Phys. A 61 (1995) 253-261.
125. J. Hartmann, M. Reichling, E. Matthias, Thermal resistance of thermal barriers in polycrystalline diamond, Progress in Natural Science 6 (1996) S297-S300.
126. I. Hatta, Y. Sasuga, R. Kato, A. Maesono, Thermal diffusivity measurement of thin films by means of an ac calorimetric method, Rev. Sci. Instrum. 56 (1985) 1643-1647.
127. Y. Gu, I. Hatta, Development of ac calorimetric method for thermal diffusivity measurements IV: films with low thermal diffusivity and very thin films, Jpn. J. Appl. Phys. 30 (1991) 1295-1298.
128. J. Bodzenta, J. Mazur, R. Bukowski, Z. Kleszczewski, Photothermal measurements for plates, Proc. SPIE 2643 (1995) 286-292.
129. J. Bodzenta, A. Kaźmierczak-Bałata, Investigation of thermal properties of SiC using photothermal method, J. Phys. IV France 137 (2006) 245-250.
130. J. Bodzenta, J. Mazur, Z. Kleszczewski, Photothermal determination of the thermal conductivity of superhard thin films, in Diamond Based Composites and Related Materials, NATO ASI Series 3. High Technology - Vol. 38, Kluwer Academic Publishers 1997, pp. 261-268.
131. J. Bodzenta, J. Mazur, Z. Kleszczewski, Photothermal measurements of thermal conductivity of thin amorphous films, in Diamond and Diamond-like Film Application, Technomic Publishing Company, Lancaster 1998, pp. 321-330.
132. J. Bodzenta, J. Mazur, S. Mitura, P. Niedzielski, Investigation of DLC coated silicon wafers, J. Chem. Vap. Deposit. 3 (1995) 311-323.
133. J. Bodzenta, B. Burak, A. Jagoda, B. Stańczyk, Thermal conductivity of laser mirror coatings measured by photothermal method, J. Phys. IV France 109 (2003) 1-8.
134. J. Bodzenta, B. Burak, A. Jagoda, B. Stańczyk, Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates, Diamond Relat. Mater. 14 (2005) 1169-1174.
135. D.G. Cahill, Thermal conductivity measurement from 30 to 750 K: the 3ω method, Rev. Sci. Instrum. 61 (1990) 802-808.
136. C.C. Williams, H.K. Wikramasinghe, Scanning thermal profiler, Appl. Phys. Lett. 49 (1986) 15871589.
137. A. Majumdar, Scanning thermal microscopy, Ann. Rev. Mater. Sci. 29 (1999) 505-585.