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Volumn 6, Issue 10, 1997, Pages 1338-1341

Thermal properties of β-SiC epitaxial layers between 150 °C and 500 °C measured by using microstructures

Author keywords

Heat diffusion; High temperature; SiC; Thermal conductivity

Indexed keywords


EID: 0042227433     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00109-X     Document Type: Article
Times cited : (4)

References (12)
  • 3
    • 0003528481 scopus 로고
    • Thermophysical properties of matter, the TPRC data series
    • IFI Plenum Data Corp., New York
    • Y.S. Touloukian, C.Y. Ho, Thermophysical Properties of Matter, The TPRC Data Series, IFI Plenum Data Corp., New York, Thermal Diffusivity, vol. 10, 1973.
    • (1973) Thermal Diffusivity , vol.10
    • Touloukian, Y.S.1    Ho, C.Y.2
  • 7
    • 0003679027 scopus 로고
    • McGraw-Hill, Singapore
    • S.M. Sze (Ed.), VLSI Technology, McGraw-Hill, Singapore, 1985.
    • (1985) VLSI Technology
    • Sze, S.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.