Measurements of the thermal conductivity of amorphous materials with low dielectric constants

Physica B: Condensed Matter

Volumn 316-317, Issue , 2002, Pages 254-257

  Daly, Brian C ^a   Antonelli, George A ^a   Maris, Humphrey J ^a   Ford, Wayne K ^b   Wong, Larry ^b   Andideh, Ebrahim ^b  

^a BROWN UNIVERSITY   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Amorphous materials; Low k dielectrics; Optical measurements; Thermal conductivity

Indexed keywords

DEPOSITION; DIELECTRIC MATERIALS; HEATING; PERMITTIVITY; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL CONDUCTIVITY; THIN FILMS;

OPTICAL MEASUREMENTS;

AMORPHOUS MATERIALS;

EID: 0036566791     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(02)00478-7     Document Type: Conference Paper

References (5)