Thermal conductivity of AlN and AlN-GaN thin films deposited on Si and GaAs substrates

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1169-1174

  Bodzenta, J ^a   Burak, B ^a   Jagoda, A ^b   Stanczyk B ^b  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

Aluminum nitride (AlN); Coatings; Gallium nitride (GaN); Thermal properties

Indexed keywords

ALUMINUM NITRIDE; COATING TECHNIQUES; DATA REDUCTION; DEPOSITION; GALLIUM NITRIDE; THERMAL CONDUCTIVITY OF SOLIDS; THERMODYNAMIC PROPERTIES; WAVE PROPAGATION;

COATING LAYERS; INVERSE SPACE; LAYERED STRUCTURES; THERMAL WAVE PROPAGATION;

THIN FILMS;

EID: 18444419177     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.01.016     Document Type: Conference Paper

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