Ultra-Low Thermal Conductivity in W/Al2O3 Nanolaminates

Science

Volumn 303, Issue 5660, 2004, Pages 989-990

  Costescu, R M ^a   Cahill, D G ^a   Fabreguette, F H ^b   Sechrist, Z A ^b   George, S M ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TRANSFER; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; SPUTTER DEPOSITION; THERMAL CONDUCTIVITY; THIN FILMS;

ATOMIC LAYER DEPOSITION; THERMAL BARRIERS;

NANOSTRUCTURED MATERIALS;

ALUMINUM OXIDE; TUNGSTEN;

NANOTECHNOLOGY;

ARTICLE; DENSITY; HEAT TRANSFER; MATERIAL STATE; MICROWAVE OVEN; PRIORITY JOURNAL; REACTION ANALYSIS; THERMAL CONDUCTIVITY; VIBRATION;

EID: 1142310597     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.1093711     Document Type: Article

References (20)

1. D. G. Cahill et al., J. Appl. Phys. 93, 793 (2003).
2. N. P. Padture, M. Gell, E. H. Jordan, Science 296, 280 (2002).
3. S. T. Huxtable et al., Appl. Phys. Lett. 80, 1737 (2002).
4. K. E. Goodson, J. Heat Transfer 118, 279 (1996).
5. C.-W. Nan, R. Birringer, D. R. Clarke, H. Gleiter, J. Appl. Phys. 81, 6692 (1997).
6. R. J. Stoner, H. J. Maris, Phys. Rev. B 48, 16373 (1993).
7. S.-M. Lee, D. G. Cahill, T. H. Allen, Phys. Rev. B 52, 253 (1995).
8. D. P. H. Hasselman et al., Am. Ceram. Soc. Bull. 66, 799 (1987).
9. K. W. Schlichting, N. P. Padture, P. G. Klemens, J. Mater. Sci. 36, 3003 (2001).
10. G. Soyez et al., Appl. Phys, Lett. 77, 1155 (2000).
11. Materials and methods are available as supporting material on Science Online.
12. A. C. Dillon, A. W. Ott, J. D. Way, S. M. George, Surf. Sci. 322, 230 (1995).
13. J. W. Klaus, S. J. Ferro, S. M. George, Thin Solid Films 360, 145 (2000).
14. C. A. Paddock, G. L. Eesley, J. Appl. Phys. 60, 285 (1986).
15. D. A. Young, C. Thomsen, H. T. Grahn, H. J. Maris, J. Tauc, in Phonon Scattering in Condensed Matter, A. C. Anderson, J. P. Wolfe, Eds. (Springer, Berlin, 1986), p. 49-51.
16. D. G. Cahill, K. E. Goodson, A. Majumdar, J. Heat Transfer 124, 223 (2002).
17. R. M. Costescu, M. A. Wall, D. G. Cahill, Phys. Rev. B 67, 54302 (2003).
18. A. Feldman, High Temp. High Pressures 31, 293 (1999).
19. E. T. Swartz, R. O. Pohl, Rev. Mod. Phys. 61, 605 (1989).
20. Supported by NSF grant no. CTS-0319235, U.S. Department of Energy (DOE) grant no. DEFG02-01-ER45938, and the Air Force Office of Scientific Research. Sample characterization used the Laser Facility of the Seitz Materials Research Laboratory and the facilities of the Center for Microanalysis of Materials, which is partially supported by DOE under grant no. DEFG02-91-ER45439.