SCOPUS 정보 검색 플랫폼

Physica Status Solidi (A) Applied Research

Volumn 154, Issue 1, 1996, Pages 219-238

Microstructure evolution and defect incorporation in highly oriented and textured CVD diamond films

(6) Von Kaenel, Y a Stiegler, J a Blank, E a Chauvet, O a Hellwig, Ch b Plamann, K c

a EPFL (Switzerland)

b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY (Switzerland)

c SORBONNE UNIVERSITÉ (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; EMISSION SPECTROSCOPY; GRAIN BOUNDARIES; PARAMAGNETIC RESONANCE; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SURFACE ROUGHNESS; TRANSPARENCY; X RAY DIFFRACTION;

ABSORPTION COEFFICIENT; CHEMICAL VAPOR DEPOSITED DIAMOND FILMS; DEFECT DENSITY; DEFECT INCORPORATION; FILM THICKNESS; LUMINESCENCE SPECTROSCOPY;

DIAMOND FILMS;

EID: 0030107275 PISSN: 00318965 EISSN: None Source Type: Journal
DOI: 10.1002/pssa.2211540117 Document Type: Article

Times cited : (50)

References (56)

1
- 0026642808
- B. L. JONES, Mater. Sci. Engng. 11, 149 (1992).
- (1992) Mater. Sci. Engng. , vol.11 , pp. 149
- Jones, B.L.¹

2
- 0006656805
- A. GARCIA, N. FLAÑO, J. L. VIVIENTE, J. I. ONATE, C. GOMEZ-ALEIXANDRE, and O. SANCHEZ-GARRIDO, Diamond relat. Mater. 2, 933 (1993).
- (1993) Diamond Relat. Mater. , vol.2 , pp. 933
- Garcia, A.¹ Flaño, N.² Viviente, J.L.³ Onate, J.I.⁴ Gomez-Aleixandre, C.⁵ Sanchez-Garrido, O.⁶

3
- 0027559861
- D. SHECHTMAN, J. L. HUTCHISON, L. H. ROBINS, E. N. FARABAUGH, and A. FELDMAN, J. Mater. Res. 8, 473 (1992).
- (1992) J. Mater. Res. , vol.8 , pp. 473
- Shechtman, D.¹ Hutchison, J.L.² Robins, L.H.³ Farabaugh, E.N.⁴ Feldman, A.⁵

4
- 0006620117
- H. ETO, Y. TAMOU, Y. OHSAWA, and N. KIKUCHI, Diamond relat. Mater. 1, 373 (1992).
- (1992) Diamond Relat. Mater. , vol.1 , pp. 373
- Eto, H.¹ Tamou, Y.² Ohsawa, Y.³ Kikuchi, N.⁴

5
- 0009109762
- J. E. GRAEBNER, S. JIN, G. W. KAMMLOTT, Y.-H. WONG, J. A. HERB, and C. F. GARDINIER, Diamond relat. Mater. 2, 1059 (1993).
- (1993) Diamond Relat. Mater. , vol.2 , pp. 1059
- Graebner, J.E.¹ Jin, S.² Kammlott, G.W.³ Wong, Y.-H.⁴ Herb, J.A.⁵ Gardinier, C.F.⁶

6
- 0027580666
- B. HUANG, D. K. REINHARD, and J. ASMUSSEN, Diamond relat. Mater. 2, 812 (1993).
- (1993) Diamond Relat. Mater. , vol.2 , pp. 812
- Huang, B.¹ Reinhard, D.K.² Asmussen, J.³

7
- 36449000969
- L. BERGMANN, B. R. STONER, K. F. TURNER, J. T. GLASS, and R. J. NEMANICH, J. appl. Phys. 73, 3951 (1992).
- (1992) J. Appl. Phys. , vol.73 , pp. 3951
- Bergmann, L.¹ Stoner, B.R.² Turner, K.F.³ Glass, J.T.⁴ Nemanich, R.J.⁵

8
- 0028064120
- L. J. BERNARDEZ and K. F. MCCARTY, Diamond relat. Mater. 3, 22 (1993).
- (1993) Diamond Relat. Mater. , vol.3 , pp. 22
- Bernardez, L.J.¹ Mccarty, K.F.²

9
- 1542791419
- D. T. MORELLI and C. UHER, Appl. Phys. Letters 63, 165 (1993).
- (1993) Appl. Phys. Letters , vol.63 , pp. 165
- Morelli, D.T.¹ Uher, C.²

10
- 27744522738
- K. M. MCNAMARA, K. K. GLEASON, and C. J. ROBINSON, J. Vacuum Sci. Technol. A 10, 3143 (1992).
- (1992) J. Vacuum Sci. Technol. A , vol.10 , pp. 3143
- Mcnamara, K.M.¹ Gleason, K.K.² Robinson, C.J.³

11
- 36449003141
- J. RUAN, W. J. CHOYKE, and W. D. PARTLOW, Appl. Phys. Letters 58, 295 (1990).
- (1990) Appl. Phys. Letters , vol.58 , pp. 295
- Ruan, J.¹ Choyke, W.J.² Partlow, W.D.³

12
- 49349119926
- Utrecht
- E. A. BURGEMEISTER, Physica (Utrecht) 93B, 165 (1978).
- (1978) Physica , vol.93 B , pp. 165
- Burgemeister, E.A.¹

13
- 84911607668
- Diamond Optics II
- T. FENG, SPIE 1146 (Diamond Optics II), 159 (1989).
- (1989) SPIE , vol.1146 , pp. 159
- Feng, T.¹

14
- 0027609735
- B. R. STONER, S. R. SAHAIDA, J. P. BADE, P. SOUTHWORTH, and P. J. ELLIS, J. Mater. Res. 8, 1334 (1993).
- (1993) J. Mater. Res. , vol.8 , pp. 1334
- Stoner, B.R.¹ Sahaida, S.R.² Bade, J.P.³ Southworth, P.⁴ Ellis, P.J.⁵

15
- 0028483398
- O. W. KÄDING, M. RÖSLER, R. ZACHAI, H.-J. FÜSSER, and E. MATTHIAS, Diamond relat. Mater. 3, 1178 (1994).
- (1994) Diamond Relat. Mater. , vol.3 , pp. 1178
- Käding, O.W.¹ Rösler, M.² Zachai, R.³ Füsser, H.-J.⁴ Matthias, E.⁵

16
- 0028419270
- B. A. FOX, B. R. STONER, D. M. MALTA, P. J. ELLIS, R. C. GLASS, and F. R. SIVAZLIAN, Diamond relat. Mater. 3, 382 (1994).
- (1994) Diamond Relat. Mater. , vol.3 , pp. 382
- Fox, B.A.¹ Stoner, B.R.² Malta, D.M.³ Ellis, P.J.⁴ Glass, R.C.⁵ Sivazlian, F.R.⁶

17
- 30244501352
- M. KAMO, Y. SATO, S. MATSUMOTO, and N. SETAKA, J. Crystal Growth 62, 642 (1983).
- (1983) J. Crystal Growth , vol.62 , pp. 642
- Kamo, M.¹ Sato, Y.² Matsumoto, S.³ Setaka, N.⁴

18
- 0028538531
- P. K. BACHMANN, H. D. BAUSEN, H. LADE, D. LEERS, D. U. WICHERT, N. HERRES, R. KOHL, and P. KOIDL, Diamond relat. Mater 3, 1308 (1994).
- (1994) Diamond Relat. Mater , vol.3 , pp. 1308
- Bachmann, P.K.¹ Bausen, H.D.² Lade, H.³ Leers, D.⁴ Wichert, D.U.⁵ Herres, N.⁶ Kohl, R.⁷ Koidl, P.⁸

19
- 85033871197
- Y. VON KAENEL and E. BLANK, Analusis 22, M35 (1994).
- (1994) Analusis , vol.22
- Von Kaenel, Y.¹ Blank, E.²

20
- 84918245251
- R. LOUDON, Adv. Phys. 13, 423 (1964).
- (1964) Adv. Phys. , vol.13 , pp. 423
- Loudon, R.¹

21
- 21544449286
- X. JIANG, C.-P. KLAGES, R. ZACHAI, M. HARTWEG, and H.-J. FÜSSER, Appl. Phys. Letters 62, 3438 (1993).
- (1993) Appl. Phys. Letters , vol.62 , pp. 3438
- Jiang, X.¹ Klages, C.-P.² Zachai, R.³ Hartweg, M.⁴ Füsser, H.-J.⁵

22
- 0028417180
- K. PLAMANN, D. FOURNIER, E. ANGER, and A. GICQUEL, Diamond relat. Mater. 3, 752 (1994).
- (1994) Diamond Relat. Mater. , vol.3 , pp. 752
- Plamann, K.¹ Fournier, D.² Anger, E.³ Gicquel, A.⁴

23
- 0009854348
- C. WILD, P. KOIDL, N. HERRES, W. MÜLLER-SEBERT, and T. ECKERMANN, Electrochem. Soc. Proc. 91, 224 (1991).
- (1991) Electrochem. Soc. Proc. , vol.91 , pp. 224
- Wild, C.¹ Koidl, P.² Herres, N.³ Müller-Sebert, W.⁴ Eckermann, T.⁵

24
- 0039101791
- Y. VON KAENEL, J. STIEGLER, and E. BLANK, Diamond relat. Mater. 4, 972 (1995).
- (1995) Diamond Relat. Mater. , vol.4 , pp. 972
- Von Kaenel, Y.¹ Stiegler, J.² Blank, E.³

25
- 85033842130
- PhD Thesis, Institut National Polytechnique de Grenoble (France), URA CNRS 413
- L. FAYETTE, PhD Thesis, Institut National Polytechnique de Grenoble (France), URA CNRS 413, 1995.
- (1995)
- Fayette, L.¹

26
- 30244535151
- J. ROBERTSON and E. P. REILLY, Phys. Rev. B 35, 2946 (1987).
- (1987) Phys. Rev. B , vol.35 , pp. 2946
- Robertson, J.¹ Reilly, E.P.²

27
- 4243597147
- R. E. SHRODER and R. J. NEMANICH, Phys. Rev. B 41, 3738 (1990).
- (1990) Phys. Rev. B , vol.41 , pp. 3738
- Shroder, R.E.¹ Nemanich, R.J.²

28
- 4243156165
- Diamond Optics V
- L. H. ROBINS, A. FELDMAN, and E. N. FARABAUGH, SPIE 1759 (Diamond Optics V), 70 (1992).
- (1992) SPIE , vol.1759 , pp. 70
- Robins, L.H.¹ Feldman, A.² Farabaugh, E.N.³

29
- 0010684917
- K. M. MCNAMARA, K. K. GLEASON, D. J. VESTYCK, and J. E. BUTLER, Diamond relat. Mater. 1, 1145 (1992).
- (1992) Diamond Relat. Mater. , vol.1 , pp. 1145
- Mcnamara, K.M.¹ Gleason, K.K.² Vestyck, D.J.³ Butler, J.E.⁴

30
- 0028492924
- L. FAYETTE, B. MARCUS, M. MERMOUX, M. RASMAN, L. ABELLO, and G. LUCAZEAU, J. appl. Phys. 76, 1604 (1993).
- (1993) J. Appl. Phys. , vol.76 , pp. 1604
- Fayette, L.¹ Marcus, B.² Mermoux, M.³ Rasman, M.⁴ Abello, L.⁵ Lucazeau, G.⁶

31
- 0026204518
- T. A. KARPUKHINA, L. L. BOUILOV, and V. F. CHUVAEV, Surface Coatings Technol. 47, 538 (1991).
- (1991) Surface Coatings Technol. , vol.47 , pp. 538
- Karpukhina, T.A.¹ Bouilov, L.L.² Chuvaev, V.F.³

32
- 0024090045
- I. WATANABE and K. SUGATA, Japan. J. appl. Phys. 27, 1808 (1988).
- (1988) Japan. J. Appl. Phys. , vol.27 , pp. 1808
- Watanabe, I.¹ Sugata, K.²

33
- 0042035833
- M. FANCIULLI and T. D. MOUSTAKAS, Diamond relat. Mater. 1, 773 (1992).
- (1992) Diamond Relat. Mater. , vol.1 , pp. 773
- Fanciulli, M.¹ Moustakas, T.D.²

34
- 0027073665
- W. ZHANG, F. ZHANG, Q. WU, and G. CHEN, Mater. Letters 15, 292 (1992).
- (1992) Mater. Letters , vol.15 , pp. 292
- Zhang, W.¹ Zhang, F.² Wu, Q.³ Chen, G.⁴

35
- 0028421993
- I. WATANABE, K. HARUTA, and Y. SHIMAMURA, Japan. J. appl. Phys. 33, 2035 (1994).
- (1994) Japan. J. Appl. Phys. , vol.33 , pp. 2035
- Watanabe, I.¹ Haruta, K.² Shimamura, Y.³

36
- 0000034695
- H. JIA, J. SHIXAR, D. P. LANG, and M. PHUSKI, Phys. Rev. B 48, 17595 (1993).
- (1993) Phys. Rev. B , vol.48 , pp. 17595
- Jia, H.¹ Shixar, J.² Lang, D.P.³ Phuski, M.⁴

37
- 36149014813
- W. V. SMITH, P. P. SOROKIN, I. L. GELLES, and G. J. LASHER, Phys. Rev. B 115, 1546 (1959).
- (1959) Phys. Rev. B , vol.115 , pp. 1546
- Smith, W.V.¹ Sorokin, P.P.² Gelles, I.L.³ Lasher, G.J.⁴

38
- 0003894412
- Ed. R. BERMAN, Clarendon Press
- R. BERMAN, in: Physical Properties of Diamond, Ed. R. BERMAN, Clarendon Press, 1965.
- (1965) Physical Properties of Diamond
- Berman, R.¹

39
- 0027565581
- C. WILD, P. KOIDL, W. MÜLLER-SEBERT, H. WALCHER, R. KOHL, N. HERRES, R. LOCHER, R. SAMLENSKI, and R. BRENN, Diamond relat. Mater. 2, 158 (1993).
- (1993) Diamond Relat. Mater. , vol.2 , pp. 158
- Wild, C.¹ Koidl, P.² Müller-Sebert, W.³ Walcher, H.⁴ Kohl, R.⁵ Herres, N.⁶ Locher, R.⁷ Samlenski, R.⁸ Brenn, R.⁹

40
- 0028456792
- Z. L. WANG, J. BENTLEY, R. E. CLAUSING, L. HEATHEHLEY, and L. L. HORTON, J. Mater. Res. 9, 1552 (1994).
- (1994) J. Mater. Res. , vol.9 , pp. 1552
- Wang, Z.L.¹ Bentley, J.² Clausing, R.E.³ Heathehley, L.⁴ Horton, L.L.⁵

41
- 0000185658
- R. SAMLENSKI, J. SCHMÄLZLIN, R. BRENN, C. WILD, W. MÜLLER-SEBERT, and P. KOIDL, Diamond relat. Mater. 4, 503 (1995).
- (1995) Diamond Relat. Mater. , vol.4 , pp. 503
- Samlenski, R.¹ Schmälzlin, J.² Brenn, R.³ Wild, C.⁴ Müller-Sebert, W.⁵ Koidl, P.⁶

42
- 36449008815
- R. SAMLENSKI, C. HAUG, R. BRENN, C. WILD, and P. KOIDL, Appl. Phys. Letters 67, 2798 (1995).
- (1995) Appl. Phys. Letters , vol.67 , pp. 2798
- Samlenski, R.¹ Haug, C.² Brenn, R.³ Wild, C.⁴ Koidl, P.⁵

43
- 21544478131
- R. LOCHER, C. WILD, N. HERRES, D. BEHR, and P. KOIDL, Appl. Phys. Letters 65, 34 (1994).
- (1994) Appl. Phys. Letters , vol.65 , pp. 34
- Locher, R.¹ Wild, C.² Herres, N.³ Behr, D.⁴ Koidl, P.⁵

44
- 0009197747
- Ed. G. DAVIES, INSPEC, The Institution of Electrical Engineers, London (UK)
- M. H. NAZARÉ, in: Properties and Growth of Diamond, Ed. G. DAVIES, INSPEC, The Institution of Electrical Engineers, London (UK) 1994 (p. 85).
- (1994) Properties and Growth of Diamond , pp. 85
- Nazaré, M.H.¹

45
- 0343977036
- J. A. VAN WYK and J. H. N. LOUBSER, J. Phys. C 16, 1501 (1983).
- (1983) J. Phys. C , vol.16 , pp. 1501
- Van Wyk, J.A.¹ Loubser, J.H.N.²

46
- 0011400914
- R. BERMAN, P. R. HUDSON, and M. MARTINEZ, J. Phys. C 8, L430 (1975).
- (1975) J. Phys. C , vol.8
- Berman, R.¹ Hudson, P.R.² Martinez, M.³

47
- 0028374363
- S. P. MEHANDRU and A. B. ANDERSON. J. Mater. Res. 9, 383 (1994).
- (1994) J. Mater. Res. , vol.9 , pp. 383
- Mehandru, S.P.¹ Anderson, A.B.²

48
- 4243067288
- L. H. ROBINS, L. P. COOK, E. N. FARABAUGH, and A. FELDMAN, Phys. Rev. B 39, 1336, (1989).
- (1989) Phys. Rev. B , vol.39 , pp. 1336
- Robins, L.H.¹ Cook, L.P.² Farabaugh, E.N.³ Feldman, A.⁴

49
- 0001913194
- R. J. GRAHAM and K. V. RAVI, Appl. Phys. Letters 60, 1310 (1992).
- (1992) Appl. Phys. Letters , vol.60 , pp. 1310
- Graham, R.J.¹ Ravi, K.V.²

50
- 85033860806
- Ed. J. P. DISMUKES and K. V. RAVI, The Electrochemical Society, Pennington (N.J.)
- A. T. COLLINS, V, HIGGS, and P. J. WRIGHT, Proc. 3rd Internat. Symp. Diamond Materials, Ed. J. P. DISMUKES and K. V. RAVI, Vol. 93-17, The Electrochemical Society, Pennington (N.J.) (pp. 899 to 905).
- Proc. 3rd Internat. Symp. Diamond Materials , vol.93 , Issue.17 , pp. 899-905
- Collins, A.T.¹ Higgs, V.² Wright, P.J.³

51
- 4243078470
- Oxford, April 5 to 8
- P. WURZINGER, M. JOKSCH, and P. PONGRATZ, Proc. Microsc. Semicond. Conf., Oxford, April 5 to 8, 1993; Inst. Phys. Conf. Ser. No. 134, 157 (1993).
- (1993) Proc. Microsc. Semicond. Conf.
- Wurzinger, P.¹ Joksch, M.² Pongratz, P.³

52
- 4243183551
- P. WURZINGER, M. JOKSCH, and P. PONGRATZ, Proc. Microsc. Semicond. Conf., Oxford, April 5 to 8, 1993; Inst. Phys. Conf. Ser. No. 134, 157 (1993).
- (1993) Inst. Phys. Conf. Ser. No. 134 , pp. 157

53
- 0028415956
- R. S. SUSSMANN, J. R. BRANDON, G. A. SCARSBROOK, C.G. SWEENEY, T. J. VALENTINE, A. J. WHITEHEAD, and C. J. H. WORT, Diamond relat. Mater. 3, 303 (1994).
- (1994) Diamond Relat. Mater. , vol.3 , pp. 303
- Sussmann, R.S.¹ Brandon, J.R.² Scarsbrook, G.A.³ Sweeney, C.G.⁴ Valentine, T.J.⁵ Whitehead, A.J.⁶ Wort, C.J.H.⁷

54
- 0029141062
- J. E. GRAEBNER, Diamond relat. Mater. 4, 1196 (1995).
- (1995) Diamond Relat. Mater. , vol.4 , pp. 1196
- Graebner, J.E.¹

55
- 0027582773
- O. STENZEL, R. PETRICH, S. ROTH, B. MAINZ, and W. SCHARFF, Diamond relat. Mater. 2, 704 (1993).
- (1993) Diamond Relat. Mater. , vol.2 , pp. 704
- Stenzel, O.¹ Petrich, R.² Roth, S.³ Mainz, B.⁴ Scharff, W.⁵

56
- 85075560590
- Diamond Optics IV
- L. H. ROBINS, E. N. FARABAUGH, and A. FELDMAN, SPIE 1534 (Diamond Optics IV), 105 (1991).
- (1991) SPIE , vol.1534 , pp. 105
- Robins, L.H.¹ Farabaugh, E.N.² Feldman, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.