Thermal conductivity measurements on diamond films based on micromechanical devices

Diamond and Related Materials

Volumn 5, Issue 6-8, 1996, Pages 644-648

  Jansen, E ^a   Dorsch, O ^a   Obermeier, E ^a   Kulisch, W ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b UNIVERSITY OF KASSEL   (Germany)

Author keywords

CVD diamond; Devices; Plasma etching; Thermal conductivity

Indexed keywords

EID: 0006744078     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00404-1     Document Type: Article

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