Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110)

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1207-1216

  Tiggelaar, R M ^a   Berenschot, J W ^a   Elwenspoek, M C ^a   Gardeniers, J G E ^a   Dorsman, R ^b   Kleijn, C R ^b  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MICROMACHINING; MONTE CARLO METHODS; PATTERNMAKING; SILICON COMPOUNDS;

PATTERN SPREADING; SIDEWALLS; THIN FILM METAL DEPOSITION;

THIN FILMS;

EID: 34547586442     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2747629     Document Type: Article

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