Parallel nanodevice fabrication using a combination of shadow mask and scanning probe methods

Applied Physics Letters

Volumn 75, Issue 9, 1999, Pages 1314-1316

  Lüthi, Roli ^a   Schlittler, Reto R ^a   Brugger, Jürgen ^a,c   Vettiger, Peter ^a   Welland, Mark E ^b   Gimzewski, James K ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MASKS; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

SCANNING PROBE MICROSCOPY; SHADOW MASKING;

NANOTECHNOLOGY;

EID: 0038768201     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124679     Document Type: Article

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