Direct growth of nanostructures by deposition through an Si3N4 shadow mask

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 4, Issue 3, 1999, Pages 196-200

  Kohler J ^a   Albrecht, M ^a   Musil, C R ^b   Bucher, E ^a  

^a UNIVERSITY OF KONSTANZ   (Germany)

^b PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; EVAPORATION; GERMANIUM; LITHOGRAPHY; MASKS; SILICON NITRIDE; VAPOR DEPOSITION;

NANODOTS; NANOSTRUCTURE ARRAYS; SHADOW MASKS;

NANOTECHNOLOGY;

EID: 0344614005     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(99)00007-7     Document Type: Article

References (19)

1. J.C. Langston, G.T. Dao, Solid State Technol. (March 1995) 57.
2. Smith H.I. J. Vac. Sci. Technol. B. 13(6):1995;2323.
3. Snow E.S., Campbell P.M. Appl. Phys. Lett. 64:1994;1932.
4. Fuchs H., Schimmel T., Lux-Steiner M., Bucher E. Ultramicroscopy. 42-44:1992;1295.
5. Crommie M.F., Lutz C.P., Eigler D.M. Science. 262:1993;218.
6. Spallas J.P., Hawryluk A.M., Kania D.R. J. Vac. Sci. Technol. B. 13:1995;1973.
7. Savas T.A., Schattenburg M.L., Carter J.M., Smith H.I. J. Vac. Sci. Technol. B. 14:1996;4167.
8. Chou S.Y., Wei M.S., Krauss P.R., Fischer P.B. J. Appl. Phys. 76:1994;6673.
9. Chou S.Y., Wei M., Krauss P.R., Fischer P.B. J. Vac. Sci. Technol. B. 12:1994;3695.
10. Cho A.Y., Reinhart F.K. Appl. Phys. Lett. 21:1972;355.
11. Döhler G.H., Hasnain G., Miller J.N. Appl. Phys. Lett. 49:1986;704.
12. Hammerl E., Eisele I. Appl. Phys. Lett. 62:1993;2221.
13. Tsang W.T., Ilegems M. Appl. Phys. Lett. 35:1979;792.
14. Tsang W.T., Cho A.Y. Appl. Phys. Lett. 32:1978;491.
15. Meier G., Kleiber M., Grundler D., Heitmann D., Wiesendanger R. Appl. Phys. Lett. 72:1998;2168.
16. Sandoghdar V., Drodofsky U., Schulze Th., Brezger B., Drewsen M., Pfau T., Mlynek J. J. Mod. Opt. 44:1997;1883.
17. Vdovin G. Optics Commun. 140:1997;187.
18. M. Albrecht, J. Pohl, H. Wider, E.U. Malang, J. Köhler, K. Friemelt, E. Bucher, Surf. Sci. 397 (1998) 354, and references therein.
19. Albrecht M., Köhler J., Friemelt K., Bucher E. Surf. Sci. 415:1998;170.