Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2896-2905

  Drüsedau, Tilo P ^a   Bock, Torsten ^a   John, Thomas Maik ^a   Klabunde, Frank ^a   Eckstein, Wolfgang ^b  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033449311     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581957     Document Type: Article

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