Thermal and mechanical analysis of a microreactor for high temperature catalytic gas phase reactions

Sensors and Actuators, A: Physical

Volumn 112, Issue 2-3, 2004, Pages 267-277

  Tiggelaar, R M ^a   Loeters, P W H ^a   Van Male, P ^b   Oosterbroek, R E ^a   Gardeniers, J G E ^a   De Croon, M H J M ^b   Schouten, J C ^b   Elwenspoek, M C ^a   Van den Berg, A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Lab on a chip; Microreactor; Modeling; Thermal analysis; Thermo mechanical analysis

Indexed keywords

AMMONIA; BORON; CATALYSIS; DOPING (ADDITIVES); ETCHING; MASS TRANSFER; METHANE; MICROMACHINING; OXIDATION; REACTION KINETICS; SILICON; STRESS ANALYSIS; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY; THIN FILM DEVICES;

CATALYTIC PARTIAL OXIDATION (CPO); LAB-ON-A-CHIP; MICROREACTORS; MODELING; THERMO-MECHANICAL ANALYSIS;

THERMOANALYSIS;

EID: 2342637831     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.036     Document Type: Article

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