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Volumn 6, Issue 2, 1996, Pages 279-284

Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching

Author keywords

[No Author keywords available]

Indexed keywords

ALCOHOLS; COMPOSITE MICROMECHANICS; CRYSTAL ORIENTATION; ETCHING; MASKS; POTASSIUM COMPOUNDS; SILICON WAFERS; SOLUTIONS;

EID: 0030156411     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/2/011     Document Type: Article
Times cited : (86)

References (9)
  • 1
    • 0018030083 scopus 로고
    • Fabrication of novel three-dimensional microstructures by anisotropic etching of (100) and (110) silicon
    • Bassous E 1978 Fabrication of novel three-dimensional microstructures by anisotropic etching of (100) and (110) silicon IEEE Trans. Electron Devices ED-25 1178-85
    • (1978) IEEE Trans. Electron Devices , vol.ED-25 , pp. 1178-1185
    • Bassous, E.1
  • 2
    • 0028407612 scopus 로고
    • Micromachined optical planes and reflectors in silicon
    • Rosengren L, Smith L and Bäcklund Y 1994 Micromachined optical planes and reflectors in silicon Sensors Actuators A 41&42 330-3
    • (1994) Sensors Actuators A , vol.41-42 , pp. 330-333
    • Rosengren, L.1    Smith, L.2    Bäcklund, Y.3
  • 6
    • 0029424484 scopus 로고
    • Physical chemistry of wet chemical anisotropic etching of silicon
    • Elwenspoek M 1995 Physical chemistry of wet chemical anisotropic etching of silicon Proc. ASME Dynamic Systems and Control Division vol 2, DSC-Vol 57-2, pp 901-8
    • (1995) Proc. ASME Dynamic Systems and Control Division , vol.2-57 DSC , Issue.2 , pp. 901-908
    • Elwenspoek, M.1
  • 7
    • 0030091411 scopus 로고    scopus 로고
    • Terracing of (100)-Si with one mask and one etching step using misaligned V-grooves
    • Vangbo M and Bäcklund Y 1996 Terracing of (100)-Si with one mask and one etching step using misaligned V-grooves J. Micromech. Microeng. 6 39-41
    • (1996) J. Micromech. Microeng. , vol.6 , pp. 39-41
    • Vangbo, M.1    Bäcklund, Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.