Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies

Applied Surface Science

Volumn 253, Issue 16, 2007, Pages 6619-6640

  Petrovic Z Lj ^a   Raspopovic Z M ^a   Stojanovic V D ^a   Jovanovic J V ^a   Malovic G ^a   Makabe, T ^b   de Urquijo, J ^c  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b KEIO UNIVERSITY   (Japan)

^c INSTITUTO DE CIENCIAS FÍSICAS   (Mexico)

Author keywords

Halogen ions; Hydrogen; Molecular ions; Monte Carlo; Negative ions; Oxygen; Plasma modeling; Plasma processing; SF 6; Swarm data; Transport coefficients

Indexed keywords

HALOGEN COMPOUNDS; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MONTE CARLO METHODS; NANOTECHNOLOGY; NEGATIVE IONS; PLASMA APPLICATIONS;

HALOGEN IONS; MOLECULAR IONS; PLASMA MODELING; SWARM DATA; TRANSPORT COEFFICIENTS;

ELECTRON TRANSPORT PROPERTIES;

EID: 34248661268     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.005     Document Type: Article

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