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Volumn 29, Issue 3, 2000, Pages 267-330

Electron interactions with SF6

Author keywords

Attachment; Coefficients; Cross section; Dissociation; Electron interactions; Ionization; Negative ions; Scattering; SF6; Sulfur hexafluoride; Transport

Indexed keywords

DISSOCIATION; ELASTIC SCATTERING; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; EXCITED STATES; IMPACT IONIZATION; IONIZATION; IONIZATION OF GASES; MOLECULES; NEGATIVE IONS; PLASMA ETCHING; POSITIVE IONS; SCATTERING; SULFUR HEXAFLUORIDE;

EID: 0034337321     PISSN: 00472689     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1288407     Document Type: Article
Times cited : (431)

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