-
2
-
-
0021529154
-
-
1984.
-
P. Segur, M. Yousfi, and M. C. Bordage, "Comparisons between different methods of solution of the Boltzmann equation adapted to the calculation of swarm parameters in a weakly ionised medium," J. Phys. D, vol. 17, no. 11, pp. 2199-2214, 1984.
-
M. Yousfi, and M. C. Bordage, "Comparisons between Different Methods of Solution of the Boltzmann Equation Adapted to the Calculation of Swarm Parameters in A Weakly Ionised Medium," J. Phys. D, Vol. 17, No. 11, Pp. 2199-2214
-
-
Segur, P.1
-
3
-
-
0022079371
-
-
1985.
-
B. M. Penetrante, J. N. Bardsley, and L. C. Pitchford, "Monte Carlo and Boltzmann calculations of the density gradient expanded distribution functions of electron swarms in gases," J. Phys. D, vol. 18, no. 6, pp. 1087-1100, 1985.
-
J. N. Bardsley, and L. C. Pitchford, "Monte Carlo and Boltzmann Calculations of the Density Gradient Expanded Distribution Functions of Electron Swarms in Gases," J. Phys. D, Vol. 18, No. 6, Pp. 1087-1100
-
-
Penetrante, B.M.1
-
4
-
-
0018483017
-
-
1979.
-
I. D. Reid, "An investigation of the accuracy of numerical solutions of Boltzman's equation for electron swarms in gases with large inelastic cross sections," Aust. J. Phys., vol. 32, no. 3, pp. 231-254, 1979.
-
"An Investigation of the Accuracy of Numerical Solutions of Boltzman's Equation for Electron Swarms in Gases with Large Inelastic Cross Sections," Aust. J. Phys., Vol. 32, No. 3, Pp. 231-254
-
-
Reid, I.D.1
-
5
-
-
0031249644
-
-
1997.
-
A. M. Nolan, M. J. Brennan, K. F. Ness, and A. B. Wedding, "A benchmark model for analysis of electron transport in nonconservative gases," J. Phys. D, vol. 30, no. 20, pp. 2865-2871, 1997.
-
M. J. Brennan, K. F. Ness, and A. B. Wedding, "A Benchmark Model for Analysis of Electron Transport in Nonconservative Gases," J. Phys. D, Vol. 30, No. 20, Pp. 2865-2871
-
-
Nolan, A.M.1
-
6
-
-
0031557333
-
-
1997.
-
R. D. White, M. J. Brennan, and K. F. Ness, "Benchmark simulations for electron swarms in crossed electric and magnetic fields," J. Phys. D, vol. 30, no. 5, pp. 810-816, 1997.
-
M. J. Brennan, and K. F. Ness, "Benchmark Simulations for Electron Swarms in Crossed Electric and Magnetic Fields," J. Phys. D, Vol. 30, No. 5, Pp. 810-816
-
-
White, R.D.1
-
7
-
-
0029250972
-
-
1995.
-
M. Surendra, "Radiofrequency discharge benchmark model comparison," Plasma Sources Sei. Techn., vol. 4, no. 1, pp. 58-73, 1995.
-
"Radiofrequency Discharge Benchmark Model Comparison," Plasma Sources Sei. Techn., Vol. 4, No. 1, Pp. 58-73
-
-
Surendra, M.1
-
8
-
-
0000445536
-
-
1994.
-
N. Nakano, N. Shimura, Z. Lj. Petrovic, and T. Makabe, "Simulations of RF glow discharges in SFg by the relaxation continuum model: Physical model and function of the narrow gap reactive-ion plasma etcher," Phys. Rev. E, vol. 49, no. 5, pp. 4455-4465, 1994.
-
N. Shimura, Z. Lj. Petrovic, and T. Makabe, "Simulations of RF Glow Discharges in SFg by the Relaxation Continuum Model: Physical Model and Function of the Narrow Gap Reactive-ion Plasma Etcher," Phys. Rev. E, Vol. 49, No. 5, Pp. 4455-4465
-
-
Nakano, N.1
-
9
-
-
0031573410
-
-
1997.
-
R. E. Robson, R. D. White, and T. Makabe, "Charged particle transport in harmonically varying electric fields: Foundations and phenomenology," Annals Phys., vol. 261, no. 1, pp. 74-113, 1997.
-
R. D. White, and T. Makabe, "Charged Particle Transport in Harmonically Varying Electric Fields: Foundations and Phenomenology," Annals Phys., Vol. 261, No. 1, Pp. 74-113
-
-
Robson, R.E.1
-
10
-
-
0027261615
-
-
1993.
-
T. Kunst, B. Goetz, and B. Schmidt, "Precision measurements of magnetic delfection angles and drift velocities in crossed electric and magnetic fields," Nucl. Instrum. Meth. A, vol. 324, no. 1, pp. 127-140, 1993.
-
B. Goetz, and B. Schmidt, "Precision Measurements of Magnetic Delfection Angles and Drift Velocities in Crossed Electric and Magnetic Fields," Nucl. Instrum. Meth. A, Vol. 324, No. 1, Pp. 127-140
-
-
Kunst, T.1
-
11
-
-
0020827556
-
-
1983.
-
M. J. Kushner, "Monte Carlo simulation of electron properties in RF parallel plate capacitively coupled discharges," J. Appl. Phys., vol. 54, no. 9, pp. 4958-965, 1983.
-
"Monte Carlo Simulation of Electron Properties in RF Parallel Plate Capacitively Coupled Discharges," J. Appl. Phys., Vol. 54, No. 9, Pp. 4958-965
-
-
Kushner, M.J.1
-
12
-
-
36449008636
-
-
1995.
-
A. Bogaerts, R. Gijbels, and W. J. Goedheer, "Hybrid Monte Carlo-fluid model of a direct current glow discharge," J. Appl. Phys., vol. 78, no. 4, pp. 2233-2241, 1995.
-
R. Gijbels, and W. J. Goedheer, "Hybrid Monte Carlo-fluid Model of A Direct Current Glow Discharge," J. Appl. Phys., Vol. 78, No. 4, Pp. 2233-2241
-
-
Bogaerts, A.1
-
13
-
-
33747362251
-
-
1998.
-
G. J. Parker and W. N. G. Hitchon, "Convected scheme simulations of glow discharges," in Electron Kinetics and Applications of Glow Discharges, U. Kortshagen and L. D. Tsendin, Ed. New York: Plenum, 1998.
-
"Convected Scheme Simulations of Glow Discharges," in Electron Kinetics and Applications of Glow Discharges, U. Kortshagen and L. D. Tsendin, Ed. New York: Plenum
-
-
Parker, G.J.1
Hitchon, W.N.G.2
-
14
-
-
0032492526
-
-
and Z. Lj. Petrovic, 1998.
-
V. D. Stojanovic and Z. Lj. Petrovic, "Comparisons of the results of Monte Carlo simulations with experimental data for electron swarms in JV2 from moderate to very high electric field to gas density ratios (E/N)" J. Phys. D, vol. 31, no. 7, pp. 834-846, 1998.
-
"Comparisons of the Results of Monte Carlo Simulations with Experimental Data for Electron Swarms in JV2 from Moderate to Very High Electric Field to Gas Density Ratios (E/N)" J. Phys. D, Vol. 31, No. 7, Pp. 834-846
-
-
Stojanovic, V.D.1
-
15
-
-
0001556531
-
-
1997.
-
K. Maeda, T. Makabe, N. Nakano, S. Bzenic, and Z. Lj. Petrovic, "Diffusion tensor in electron transport in a radio-frequency field," Phys. Rev. E, vol. 55, no. 5, pp. 5901-5908, 1997.
-
T. Makabe, N. Nakano, S. Bzenic, and Z. Lj. Petrovic, "Diffusion Tensor in Electron Transport in A Radio-frequency Field," Phys. Rev. E, Vol. 55, No. 5, Pp. 5901-5908
-
-
Maeda, K.1
-
16
-
-
24444444938
-
-
1986.
-
K. F. Ness and R. E. Robson, "Velocity distribution and transport coefficients of electron swarms in gases-Part II: Moment equations and applications," Phys. Rev. A, vol. 34, no. 3, pp. 2185-2209, 1986.
-
"Velocity Distribution and Transport Coefficients of Electron Swarms in Gases-Part II: Moment Equations and Applications," Phys. Rev. A, Vol. 34, No. 3, Pp. 2185-2209
-
-
Ness, K.F.1
Robson, R.E.2
-
18
-
-
0001390399
-
-
1996.
-
J. P. Verboncoeur, G. J. Parker, B. M. Penetrante, and W. L. Morgan, "Comparison of collision rates in particle-in-cell, Monte Carlo and Boltzmann codes," J. Appl. Phys., vol. 80, no. 3, pp. 1299-1303, 1996.
-
G. J. Parker, B. M. Penetrante, and W. L. Morgan, "Comparison of Collision Rates in Particle-in-cell, Monte Carlo and Boltzmann Codes," J. Appl. Phys., Vol. 80, No. 3, Pp. 1299-1303
-
-
Verboncoeur, J.P.1
-
19
-
-
33644790994
-
-
1975.
-
J. Lucas and H. T. Saelee, "A comparison of a Monte Carlo simulation and the Boltzmann solution for electron swarm motion in gases," J. Phys. D, vol. 8 no. 6, pp. 640-650, 1975.
-
"A Comparison of A Monte Carlo Simulation and the Boltzmann Solution for Electron Swarm Motion in Gases," J. Phys. D, Vol. 8 No. 6, Pp. 640-650
-
-
Lucas, J.1
Saelee, H.T.2
-
20
-
-
0028497124
-
-
1994.
-
K. F. Ness, "Multi-term solution of the Boltzmann equation for electron swarms in crossed electric and magnetic fields," J. Phys. D, vol. 27, no. 9, pp. 1848-1861, 1994.
-
"Multi-term Solution of the Boltzmann Equation for Electron Swarms in Crossed Electric and Magnetic Fields," J. Phys. D, Vol. 27, No. 9, Pp. 1848-1861
-
-
Ness, K.F.1
-
21
-
-
0014524283
-
-
1969.
-
H. R. Skullerud, "Longitudinal diffusion of electrons in electrostatic fields in gases," J. Pys. B, vol. 2, no. 6, pp. 696-705, 1969.
-
"Longitudinal Diffusion of Electrons in Electrostatic Fields in Gases," J. Pys. B, Vol. 2, No. 6, Pp. 696-705
-
-
Skullerud, H.R.1
-
22
-
-
33747373746
-
-
1980.
-
K. Kumar, H. R. Skullerud, and R. E. Robson, "Kinetic theory of charged particle swarms in neutral gases," Aust. J. Phys., vol. 33, no. 2B, pp. 343-48, 1980.
-
H. R. Skullerud, and R. E. Robson, "Kinetic Theory of Charged Particle Swarms in Neutral Gases," Aust. J. Phys., Vol. 33, No. 2B, Pp. 343-48
-
-
Kumar, K.1
-
23
-
-
33747375283
-
-
1991.
-
R. E. Robson, "Transport phenomena in the presence of reactions: Definition and measurements of transport coefficients," Aust. J. Phys., vol. 44, no. 6, pp. 685-692, 1991.
-
"Transport Phenomena in the Presence of Reactions: Definition and Measurements of Transport Coefficients," Aust. J. Phys., Vol. 44, No. 6, Pp. 685-692
-
-
Robson, R.E.1
-
24
-
-
0342694093
-
-
1977.
-
T. Taniguchi, H. Tagashira, and Y. Sakai, "Validity of Boltzmann equation method for predicting the effect of ionization and attachment," J. Phys. D, vol. 10, no. 16, pp. 2301-2306, 1977.
-
H. Tagashira, and Y. Sakai, "Validity of Boltzmann Equation Method for Predicting the Effect of Ionization and Attachment," J. Phys. D, Vol. 10, No. 16, Pp. 2301-2306
-
-
Taniguchi, T.1
-
25
-
-
0001648057
-
-
1986.
-
R. E. Robson, "Pysics of reacting particle swarms in gases," J. Chem. Phys., vol. 85, no. 8, pp. 4486-501, 1986.
-
"Pysics of Reacting Particle Swarms in Gases," J. Chem. Phys., Vol. 85, No. 8, Pp. 4486-501
-
-
Robson, R.E.1
-
26
-
-
36449007647
-
-
1992.
-
2 , and SiH4/NH3 using a Monte Carlo-fluid hybrid model," J. Appl. Phys., vol. 71, no. 4, pp. 1654-1673, 1992.
-
2 , and SiH4/NH3 Using A Monte Carlo-fluid Hybrid Model," J. Appl. Phys., Vol. 71, No. 4, Pp. 1654-1673
-
-
Sommerer, T.J.1
Kushner, M.J.2
-
28
-
-
0001647049
-
-
and Z. Lj. Petrovic, 1996.
-
S. B. Vrhovac and Z. Lj. Petrovic, "Momentum transfer theory of nonconservative charged particle transport in mixtures of gases: General equations and negative differential conductivity," Phys. Rev. E, vol. 53, no. 4, pp. 4012-025, 1996.
-
"Momentum Transfer Theory of Nonconservative Charged Particle Transport in Mixtures of Gases: General Equations and Negative Differential Conductivity," Phys. Rev. E, Vol. 53, No. 4, Pp. 4012-025
-
-
Vrhovac, S.B.1
-
32
-
-
0021198075
-
-
1984.
-
Z. Lj. Petrovic, R. W. Crompton, and G. N. Haddad, "Model calculations of negative differential conductivity in gases," Aust. J. Phys., vol. 37, no. 1, pp. 23-34, 1984.
-
R. W. Crompton, and G. N. Haddad, "Model Calculations of Negative Differential Conductivity in Gases," Aust. J. Phys., Vol. 37, No. 1, Pp. 23-34
-
-
Lj Petrovic, Z.1
-
33
-
-
33747366265
-
-
1995.
-
R. White, K. Ness, and R. E. Robson, "Anomalous anisotropic diffusion in a.c. electric fields," Aust. J. Phys., vol. 48, no. 6, pp. 925-938, 1995.
-
K. Ness, and R. E. Robson, "Anomalous Anisotropic Diffusion in A.c. Electric Fields," Aust. J. Phys., Vol. 48, No. 6, Pp. 925-938
-
-
White, R.1
-
34
-
-
33747331267
-
-
pp. 2-23.
-
S. A. Bzenic, K. Maeda, Z. Lj. Petrovic, and T. Makabe, "Electron energy relaxation of electron swarms in RF fields," in P roc. XXIIICPIG (Int. Conf. Phenomena in Ionized Gases), K. Becker, W. E. Carr, and E. E. Kunhardt, Eds., Hoboken NJ: 1995, pp. 2-23.
-
K. Maeda, Z. Lj. Petrovic, and T. Makabe, "Electron Energy Relaxation of Electron Swarms in RF Fields," in P Roc. XXIIICPIG (Int. Conf. Phenomena in Ionized Gases), K. Becker, W. E. Carr, and E. E. Kunhardt, Eds., Hoboken NJ: 1995
-
-
Bzenic, S.A.1
-
35
-
-
0032331928
-
-
1998.
-
R. D. White, R. E. Robson, and K. F. Ness, "Multiterm solution of the reactive space-time dependent Boltzmann equation," J. Vac. Sei. Technol. A, vol. 16, no. 1, pp. 316-323, 1998.
-
R. E. Robson, and K. F. Ness, "Multiterm Solution of the Reactive Space-time Dependent Boltzmann Equation," J. Vac. Sei. Technol. A, Vol. 16, No. 1, Pp. 316-323
-
-
White, R.D.1
-
36
-
-
0032358626
-
-
and V. Stojanovic, 1998.
-
Z. Lj. Petrovic and V. Stojanovic, "The role of heavy particles in kinetics of low current discharges in argon at high electric field to gas number density ratio," J. Vac. Sei. Technol. A, vol. 16, no. 1, pp. 329-336, 1998.
-
"The Role of Heavy Particles in Kinetics of Low Current Discharges in Argon at High Electric Field to Gas Number Density Ratio," J. Vac. Sei. Technol. A, Vol. 16, No. 1, Pp. 329-336
-
-
Lj Petrovic, Z.1
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