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Volumn 36, Issue 12, 2003, Pages 2419-2432
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Electron collisions with the CF radicals using the R-matrix method
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DATABASE SYSTEMS;
ELECTRIC CHARGE;
ELECTRONS;
FREE RADICALS;
LOW TEMPERATURE EFFECTS;
MATRIX ALGEBRA;
PLASMA ETCHING;
SEMICONDUCTOR MATERIALS;
EXCITATION ENERGY;
PLASMA COLLISION PROCESSES;
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EID: 0038383858
PISSN: 09534075
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-4075/36/12/303 Document Type: Article |
Times cited : (31)
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References (30)
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