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Volumn 36, Issue 12, 2003, Pages 2419-2432

Electron collisions with the CF radicals using the R-matrix method

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DATABASE SYSTEMS; ELECTRIC CHARGE; ELECTRONS; FREE RADICALS; LOW TEMPERATURE EFFECTS; MATRIX ALGEBRA; PLASMA ETCHING; SEMICONDUCTOR MATERIALS;

EID: 0038383858     PISSN: 09534075     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-4075/36/12/303     Document Type: Article
Times cited : (31)

References (30)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.