Kinetic phenomena in electron transport in radio-frequency fields

Applied Surface Science

Volumn 192, Issue 1-4, 2002, Pages 1-25

  Petrovic Z Lj ^a   Raspopovic Z M ^a   Dujko, S ^a   Makabe, T ^b  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b KEIO UNIVERSITY   (Japan)

Author keywords

Electron; Kinetic phenomena; Radio frequency

Indexed keywords

COMPUTER SIMULATION; ELECTRON MOBILITY; ELECTRON TRANSPORT PROPERTIES; EXTRAPOLATION; KINETIC THEORY; MAGNETOELECTRIC EFFECTS; MONTE CARLO METHODS; PLASMAS;

ELECTRON TRANSPORTS; RADIO-FREQUENCY (RF) PLASMAS;

SURFACE PHENOMENA;

EID: 0037198335     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00018-1     Document Type: Conference Paper

References (234)

1. Proceedings of the XIV ESCAMPIG'98
2. Proceedings of the 51st GEC (gaseous electronics conference) and fourth ICRP (international conference on reactive plasmas)